# US 11,112,427 B2 · Method and tip substrate for scanning probe microscopy > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,112,427 B2 - Document ID: US11112427B2 - Status: Granted - Kind: B2 - Application number: 17/069,228 - Filed: 2020-10-13 - Published: 2021-04-22 - Granted: 2021-09-07 - Earliest claimed: 2019-10-17 - Assignees: Imec Vzw - Applicants: Imec Vzw - Inventors: Thomas Hantschel; Hugo Bender; Kristof Paredis; Antti Kanniainen - Web page: https://patentgrep.com/patent/US11112427B2 ## CPC - G01Q 70/06: Probe tip arrays - G01Q 70/10: Shape or taper - G01Q 70/14: Particular materials - G01Q 60/24: AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes - G01Q 60/30: Scanning potential microscopy - G01Q 60/50: MFM [Magnetic Force Microscopy] or apparatus therefor, e.g. MFM probes - G01Q 80/00: Applications, other than SPM, of scanning-probe techniques (manufacture or treatment of nanostructures B82B3/00; recording or reproducing information using near-field interaction G11B9/12, G11B11/24, G11B13/08) - G01Q: SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM] ## Abstract The disclosure is related to a method for performing SPM measurements, wherein a sample is attached to a cantilever and scanned across a tip. The tip is one of several tips present on a substrate comprising at least two different types of tips on its surface, thereby enabling performance of multiple SPM measurements requiring a different type of tip, without replacing the cantilever. The at least two different types of tips are different in terms of their material, in terms of their shape or size, and/or in terms of the presence or the type of active or passive components mounted on or incorporated in the substrate, and associated to tips of one or more of the different types. The disclosure is equally related to a substrate comprising a plurality of tips suitable for use in the method of the disclosure. ## Claims ### Claim 1 A method for performing a scanning probe microscopy (SPM) measurement on a sample, the method comprising: attaching the sample to a cantilever; providing a substrate comprising on a surface of the substrate a first SPM tip and second SPM tip that differ from each other in material composition, shape, or size; performing a first SPM measurement by scanning the sample across the first SPM tip, wherein performing the first SPM measurement comprises slicing away a layer of the sample using the first SPM tip; and performing a second SPM measurement by scanning the sample across the second SPM tip after performing the first SPM measurement. ### Claim 2 (depends on 1) The method according to claim 1, wherein the first SPM tip and the second SPM tip differ from each other in material composition. ### Claim 3 (depends on 1) The method according to claim 1, wherein the first SPM tip and the second SPM tip differ from each other in shape. ### Claim 4 (depends on 1) The method according to claim 1, wherein the first SPM tip and the second SPM tip differ from each other in size. ### Claim 5 (depends on 1) The method according to claim 1, wherein the first SPM tip is electrically coupled to an electronic component mounted on or incorporated in the substrate. ### Claim 6 (depends on 1) The method according to claim 1, wherein performing the first SPM measurement comprises performing the first SPM measurement as the cantilever is held parallel to the surface of the substrate. ### Claim 7 (depends on 1) The method according to claim 1, wherein performing the first SPM measurement comprises performing the first SPM measurement as the cantilever is held at an angle relative to the substrate. ### Claim 8 (depends on 1) The method according to claim 1, wherein performing the first SPM measurement comprises performing the first SPM measurement such that a surface of the sample is essentially parallel to the substrate. ### Claim 9 (depends on 1) The method according to claim 1, wherein performing the first SPM measurement comprises performing the first SPM measurement such that a first surface of the cantilever is opposite the sample and tilted at a first angle with respect to the sample and a second surface of the cantilever facing the sample is parallel to or at a second angle with respect to the sample, the second angle being different from the first angle. ### Claim 10 (depends on 1) The method according to claim 1, wherein performing the first SPM measurement comprises performing the first SPM measurement while the first SPM tip is enveloped by a liquid. ### Claim 11 (depends on 1) The method according to claim 1, wherein performing the second SPM measurement comprises performing the second SPM measurement while the second SPM tip is enveloped by a liquid. ### Claim 12 (depends on 1) The method according to claim 1, wherein performing the first SPM measurement comprises performing the first SPM measurement while the sample is encapsulated by a supporting material. ### Claim 13 A substrate comprising on its surface a first scanning probe microscopy (SPM) tip and a second SPM tip that differs from the first SPM tip in material composition, shape, or size, wherein the first SPM tip is configured for slicing away a layer of a sample and wherein the second SPM tip is configured for scanning the sample across the second SPM tip after slicing away the layer of the sample.