X-ray spectrometer

An X-ray spectrometer comprising:

• an excitation source configured to irradiate excitation rays for generating characteristic X-rays onto a prescribed irradiation area of a sample,
• a diffraction member provided to face the prescribed irradiation area;
• a slit member provided between the prescribed irradiation area and the diffraction member, the slit member having a slit extending parallel to the prescribed irradiation area and a prescribed surface of the diffraction member;
• an X-ray linear sensor having a light-incident surface in which a plurality of detection elements are arranged in a direction perpendicular to a longitudinal direction of the slit;
• a first moving mechanism configured to change an angle between the sample surface and the prescribed surface, and/or a distance between the sample surface and the prescribed surface by moving the diffraction member within a plane perpendicular to the longitudinal direction;
• a second moving mechanism configured to position the X-ray linear sensor on a path of the characteristic X-rays passed through the slit and diffracted by the prescribed surface by moving the X-ray linear sensor within the plane perpendicular to the longitudinal direction;
• a parallel light slit member configured to pass only X-rays traveling in a specific direction among the X-rays emitted from the prescribed irradiation area;
• a concave diffraction member configured to diffract and collect light having a specific wavelength among X-rays passed through the parallel light slit member and advancing to the specific direction;
• and
• an X-ray detector placed so that a light receiving surface is positioned on the prescribed surface.