# US 11,112,356 B2 · Optical reflective edge or contrast sensor

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- Number: US 11,112,356 B2
- Document ID: US11112356B2
- Status: Granted
- Kind: B2
- Application number: 16/522,769
- Filed: 2019-07-26
- Published: 2021-01-28
- Granted: 2021-09-07
- Earliest claimed: 2019-07-26
- Assignees: Photon Control Inc.
- Applicants: Photon Control Inc.
- Inventors: Yuriy Syvenkyy
- Web page: https://patentgrep.com/patent/US11112356B2

## CPC

- G01N 21/47: Scattering, i.e. diffuse reflection (G01N21/25, G01N21/41 take precedence {G01N21/55 takes precedence})
- G01V 8/22: using reflectors
- G01N 21/55: Specular reflectivity
- G01N 21/9503: {Wafer edge inspection}
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- G01V: GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS (means for indicating the location of accidentally buried, e.g. snow-buried, persons A63B29/02)

## Abstract

A precision edge detection system and sensor assembly is provided that uses a reflection technique to provide an energy efficient device that can be achieved using a relatively small form factor. There is provided an optical reflective sensor assembly that includes a light source, an optical element positioned to collimate and focus light from the light source to generate a focused beam, and at least one photodetector positioned adjacent the light source. The at least one photodetector is configured to detect light from the focused beam that has been reflected by an object positioned opposite the light source.

## Claims

### Claim 1

An optical reflective sensor assembly, comprising:
a light source;
an optical element positioned to collimate and focus light from the light source to generate a focused beam; and
a single photodetector surrounding the light source, the light source being positioned within an opening in the photodetector, the photodetector configured to detect light from the focused beam that has been reflected by an object positioned opposite the light source;
wherein the optical element is positioned at an edge of the opening.

### Claim 2 (depends on 1)

The sensor assembly of claim 1, further comprising a light insulating cap surrounding the light source, the light insulating cap supporting the optical element above the light source, the light insulating cap being surrounded by the photodetector.

### Claim 3 (depends on 1)

The sensor assembly of claim 1, wherein the light source and the photodetector are coupled to a substrate.

### Claim 4 (depends on 1)

The sensor assembly of claim 1, wherein the light source and the photodetector are coupled to a controller of an optical detection system.

### Claim 5 (depends on 1)

The sensor assembly of claim 1, wherein the photodetector is configured to detect rays of reflected light indicative of the presence of an edge of the object.

### Claim 6 (depends on 1)

The sensor assembly of claim 1, wherein the at photodetector is configured to detect rays of reflected light indicative of at least one surface of the object or multiple objects.

### Claim 7 (depends on 6)

The sensor assembly of claim 6, wherein the photodetector is configured to detect a plurality of types of rays of reflected light, each corresponding to a signature.

### Claim 8 (depends on 7)

The sensor assembly of claim 7, further comprising a memory storing signatures for at least one type of ray of reflected light.

### Claim 9 (depends on 1)

The sensor assembly of claim 1, further comprising a light filter coupled to the photodetector.

### Claim 10 (depends on 1)

The sensor assembly of claim 1, further comprising at least one lens positioned between the object and the photodetector to interact with the reflected light.

### Claim 11

An optical reflective detection system, comprising:
a substrate;
at least one optical reflective sensor assembly supported at least in part by the substrate, each sensor assembly comprising:
a light source;
an optical element positioned to collimate and focus light from the light source to generate a focused beam; and
a single photodetector surrounding the light source, the light source being positioned within an opening in the photodetector, the photodetector configured to detect light from the focused beam that has been reflected by an object positioned opposite the light source, wherein the optical element is positioned at an edge of the opening; and
a controller coupled to the at least one sensor assembly, the controller comprising a processor and memory, the memory storing computer executable instructions for operating the detection system to generate the focused beam and to detect reflected light.

### Claim 12 (depends on 11)

The system of claim 11, comprising a plurality of sensor assemblies supported by the substrate, each sensor assembly being coupled to the controller.

### Claim 13 (depends on 11)

The system of claim 11, wherein each sensor assembly further comprises a light insulating cap surrounding the light source, the light insulating cap supporting the optical element above the light source, the light insulating cap being surrounded by the photodetector.

### Claim 14 (depends on 11)

The system of claim 11, wherein the photodetector is configured to detect rays of reflected light indicative of the presence of an edge of the object.

### Claim 15 (depends on 11)

The system of claim 11, wherein the photodetector is configured to detect rays of reflected light indicative of at least one surface of the object or multiple objects.

### Claim 16 (depends on 15)

The system of claim 15, wherein the photodetector is configured to detect a plurality of types of rays of reflected light, each corresponding to a signature stored in the memory.

### Claim 17 (depends on 11)

The system of claim 11, further comprising a light filter coupled to the photodetector.

### Claim 18 (depends on 11)

The system of claim 11, further comprising at least one lens positioned between the object and the photodetector to interact with the reflected light.

### Claim 19

A method for detecting a signature of reflected light, the signature being indicative of a surface or edge of an object, the method comprising:
directing light from a light source through an optical element positioned to collimate and focus light from the light source to generate a focused beam; and
detecting light from the focused beam that has been reflected by an object positioned opposite the light source, by a single photodetector surrounding the light source, the light source being positioned within an opening in the photodetector, wherein the optical element is positioned at an edge of the opening.

### Claim 20 (depends on 19)

The method of claim 19, further comprising comparing detected rays of reflected light to at least one signature to detect an edge or surface of the object.

### Claim 21 (depends on 19)

The method of claim 19, further comprising generating an output indicative of detected rays of reflected light indicative of an edge or surface of the object.

### Claim 22 (depends on 19)

The method of claim 19, further comprising calibrating a position associated with the focused beam prior to the directing step.

### Claim 23 (depends on 19)

The method of claim 19, further comprising calibrating at least one surface contrast or edge signature according to detected rays of reflected light, prior to the directing step.
