# US 11,112,344 B2 · Particle measuring method and detection liquid

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- Number: US 11,112,344 B2
- Document ID: US11112344B2
- Status: Granted
- Kind: B2
- Application number: 16/807,459
- Filed: 2020-03-03
- Published: 2020-09-10
- Granted: 2021-09-07
- Earliest claimed: 2019-03-08
- Assignees: Kioxia Corporation; Rion Co., Ltd.
- Applicants: Kioxia Corporation; RION Co., Ltd.
- Inventors: Hiroshi Tomita; Hidekazu Hayashi; Eishi Shiobara; Kaoru Kondo; Takuya Tabuchi; Kazuna Bando; Sota Kondo
- Web page: https://patentgrep.com/patent/US11112344B2

## CPC

- G01N 15/1429: Signal processing
- G01N 15/1459: {the analysis being performed on a sample stream}
- G01N 15/0211: {Investigating a scatter or diffraction pattern}
- G01N 15/0266: {with electrical classification}
- G01N 15/1404: Handling flow, e.g. hydrodynamic focusing
- G01N 21/53: within a flowing fluid, e.g. smoke
- G01N 15/075: by optical means
- G01N 2015/0053: {in liquids, e.g. trouble}
- G01N 2015/0222: {from dynamic light scattering, e.g. photon correlation spectroscopy}
- G01N 2015/03: {Electro-optical investigation of a plurality of particles, the analyser being characterised by the optical arrangement}
- G01N 2201/067: Electro-optic, magneto-optic, acousto-optic elements
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

According to one embodiment, a particle measuring method is disclosed. The method includes irradiating a detection liquid with light. The detection liquid contains methyl salicylate. The method further includes converting scattered light from the detection liquid into an electric signal by using photoelectric conversion after irradiating the detection liquid with the light. The method further includes performing a particle measurement on the detection liquid by using the electric signal.

## Claims

### Claim 1

A particle measuring method comprising:
irradiating a detection liquid whose solvent is a methyl salicylate with light;
converting scattered light from particles in the detection liquid into an electric signal by using photoelectric conversion after irradiating the detection liquid with the light; and
performing a particle measurement on the detection liquid by using the electric signal.

### Claim 2 (depends on 1)

The particle measuring method of claim 1, wherein the particles include fluororesin.

### Claim 3 (depends on 2)

The particle measuring method of claim 2, wherein the fluororesin comprises perfluoroalkoxy alkane (PFA) or polytetrafluoroethylene (PTFE).

### Claim 4 (depends on 2)

The particle measuring method of claim 2, wherein the particle measurement comprises calculating the number of the particles based on the number of pulse waves in the electric signal.

### Claim 5 (depends on 2)

The particle measuring method of claim 2, wherein the particle measurement comprises calculating a particle size of the particles based on amplitude of pulse waves in the electric signal.

### Claim 6 (depends on 2)

The particle measuring method of claim 2, wherein the particle measurement comprises calculating a particle size of the particles based on intensity change of the electric signal resulting from Brownian movement of the particles in the detection liquid.

### Claim 7 (depends on 2)

The particle measuring method of claim 2, wherein the particle measurement comprises calculating a particle size distribution of the particles based on intensity change of the electric signal resulting from Brownian movement of the particles in the detection liquid.

### Claim 8 (depends on 2)

The particle measuring method of claim 2, wherein the particle measurement comprises calculating a particle size of the particles based on amount of movement of the particles resulting from Brownian movement of the respective particles in the detection liquid.

### Claim 9 (depends on 2)

The particle measuring method of claim 2, wherein the particle measurement comprises calculating a particle size distribution of the particles based on amount of movement of the particles resulting from Brownian movement of the respective particles in the detection liquid.

### Claim 10 (depends on 1)

The particle measuring method of claim 1, wherein the scattered light is converted into the electric signal by using a photomultiplier tube.

### Claim 11 (depends on 1)

The particle measuring method of claim 1, wherein the light includes laser light.

### Claim 12 (depends on 1)

The particle measuring method of claim 1, further comprising making the detection liquid flow through a part containing a fluororesin particle.

### Claim 13 (depends on 12)

The particle measuring method of claim 12, wherein the part is used for manufacturing semiconductor devices.

### Claim 14 (depends on 13)

The particle measuring method of claim 13, wherein the part comprises a pipe, a joint, a valve, a pump or a filter.

### Claim 15 (depends on 12)

The particle measuring method of claim 12, wherein the detection liquid is stored in a tank that is subjected to nitrogen gas sealing before the detection liquid flows through the part.