Methods and systems for self-testing MEMS inertial sensors

A method for testing a microelectromechanical system (MEMS) inertial sensor, the method comprising:

• stimulating, using a test signal, the MEMS inertial sensor;
• receiving a response signal from the MEMS inertial sensor in response to the stimulating;
• generating an in-phase response signal using the response signal and a first reference signal that is based on the test signal;
• generating a quadrature response signal using the response signal and a second reference signal that is based on the test signal and is substantially in quadrature relative to the first reference signal;
• determining, based on the quadrature response signal, whether the in-phase response signal is to be used for assessing a characteristic of the MEMS inertial sensor;
• and
• when it is determined that the in-phase response signal is to be used for assessing the characteristic of the MEMS inertial sensor, assessing the characteristic of the MEMS inertial sensor using the in-phase response signal.

A system for testing a microelectromechanical system (MEMS) inertial sensor, the system comprising:

• the MEMS inertial sensor;
• and
• test circuitry configured to:
• receive a response signal from the MEMS inertial sensor in response to a test signal;
• generate an in-phase response signal using the response signal and a first reference signal that is based on the test signal, and generating a quadrature response signal using the response signal and a second reference signal that is based on the test signal and is substantially in quadrature relative to the first reference signal;
• determining, based on the quadrature response signal, whether the in-phase response signal is to be used for assessing a characteristic of the MEMS inertial sensor;
• and
• when it is determined that the in-phase response signal is to be used for assessing the characteristic of the MEMS inertial sensor, assess the characteristic of the MEMS inertial sensor using the in-phase response signal.