Torsional oscillator micro electro mechanical systems accelerometer

Abstract

A resonant mechanical structure, such as one for use in a torsional oscillator MEMS accelerometer that includes a mounting substrate and a reference mass configured to move within a reference mass plane, the resonant mechanical structure being connected to the mounting structure and the reference mass, and the resonant mechanical structure including a body, a center of mass, and an aperture, wherein the aperture is surrounded and defined by the body, and wherein the body includes a first mass portion and a second mass portion that are configured to oscillate about an oscillation axis located within the reference mass plane, wherein the center of mass is located on the oscillation axis, and wherein a movement of the reference mass within the reference mass plane varies a moment of inertia of the body while the center of mass of the body remains located on the oscillation axis.

Dependencies are inferred from the claim text.