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US 11,112,245 B2Granted
Acousto-optic gyroscopes
AssigneeCarnegie Mellon University
InventorsGianluca Piazza, Mohamed Mahmoud, Ashraf Mahmoud, Lutong Cai, Md Shofiqul Islam Khan, Tamal Mukherjee, James Bain
Life of this patent
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Abstract
An Acousto-Optic Gyroscope (AOG) consisting of a photonic integrated device embedded into two inherently matched piezoelectric surface acoustic wave (SAW) resonators sharing the same acoustic cavity is disclosed. The micromachined strain-based AOG uses the effective index of the optical waveguide due to the acousto-optic effect rather than conventional displacement sensing.
Claims23
A device comprising:
- a substrate;
- a lithium-niobate wafer or a lithium-niobate wafer on an insulator layer disposed on the substrate;
- a drive resonator oriented in a first direction in a drive-sense plane of the lithium-niobate wafer;
- a sense resonator oriented in a second direction orthogonal to the first direction in the drive-sense plane of the lithium-niobate wafer;
- and
- a plurality of pillars disposed at the intersection of the drive and sense resonators in the drive-sense plane of the lithium-niobate wafer;
- wherein the drive and sense resonators are rotated at an angle in the drive-sense plane with respect to the direction of a cut of the lithium-niobate wafer so that the drive and sense resonators have matching resonant frequencies.
4 more elements
Dependencies are inferred from the claim text.