Fan filter unit, sterilization apparatus and clean room
AssigneeHitachi Industrial Equipment Systems Co., Ltd.
InventorsMakoto Yokoyama, Takeshi Matsumura, Hirotoshi Sato
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AssigneeHitachi Industrial Equipment Systems Co., Ltd.
InventorsMakoto Yokoyama, Takeshi Matsumura, Hirotoshi Sato
Estimating the term…
Provided are a fan filter unit and a sterilization apparatus capable of shortening a sterilization operation time to be performed at a changeover. The sterilization apparatus has: a working space; a fan filter unit for supplying clean air to the working space; and a sterilizing gas charging unit on the air suction side of the fan filter unit. The fan filter unit comprises: a fan unit section constituted by an air blower and a pressurization chamber; a dust removal filter provided on the downstream side of the fan unit section; a passage bypassing the dust removal filter; and an opening and closing mechanism of the passage. By opening the opening and closing mechanism, the air flow not passing through the dust removal filter can be supplied to the secondary side of the fan filter unit.
A fan filter unit including a fan unit section constituted by an air blower and a pressurization chamber, and a dust removal filter provided on a downstream side of the fan unit section, comprising:
A sterilization apparatus having a working space, a fan filter unit configured to supply clean air to the working space, and a sterilizing gas charging unit on a suction side of air of the fan filter unit,
A clean room having an air blowing path equipped with an air blower and a sterilization apparatus, and a working chamber to which air is blown via the sterilization apparatus connected to the air blowing path, the clean room comprising:
Dependencies are inferred from the claim text.