Radiant burner
AssigneeEdwards Limited
InventorsAndrew James Seeley, Duncan Michael Price
Life of this patent
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Abstract
A radiant burner for treating an effluent gas stream from a manufacturing processing tool includes a plurality of treatment chambers, each treatment chamber having an effluent stream inlet for supplying a respective portion of the effluent gas stream to that treatment chamber for treatment therewithin. In this way, multiple treatment chambers may be provided, each of which treats part of the effluent stream. Accordingly, the number of treatment chambers can be selected to match the flow rate of the effluent gas stream from any particular processing tool. This provides an architecture which is reliably scalable to suit the needs of any effluent gas stream flow rate.
Claims16
A radiant burner for treating an effluent gas stream from a manufacturing processing tool, comprising:
- a plurality of treatment chambers, wherein each treatment chamber includes an effluent stream inlet for supplying a respective portion of said effluent gas stream to each treatment chamber for treatment therewithin;
- and
- an end structure at least partially defining an end treatment chamber of the plurality of treatment chambers, said end structure comprising a wall which is foraminous through which treatment materials pass for introduction into said end treatment chamber, said foraminous wall at least partially defining said end treatment chamber;
- and
- a pilot aperture separated from the end treatment chamber by the end structure.
Dependencies are inferred from the claim text.