Vacuum valve comprising a force sensor

A vacuum valve for the regulation of a volume or mass flow or for the gas-tight interruption of a flow path, comprising:

• a valve seat, which comprises a valve opening defining an opening axis and a first sealing surface circumferential around the valve opening,
• a valve closure for the regulation of the volume or mass flow or for the interruption of the flow path, comprising a second sealing surface corresponding to the first sealing surface, whose variable location is defined by the respective position and alignment of the valve closure,
• a drive unit coupled to the valve closure, which is designed such that the valve closure is adjustable from
• an open position (O), in which the valve closure and the valve seat are provided without contact in relation to one another, into
• a closed position (G), in which an axially-sealing contact exists between the first sealing surface and the second sealing surface via an interposed seal, and the valve opening is thus closed in a gas-tight manner,
• and back,
• wherein the vacuum valve furthermore comprises a sensor assembly having at least one force sensor comprising a deformation-sensitive element,
• wherein the sensor assembly is designed in such a way that a measurement signal is acquired, which provides detection of a seal compression of the interposed seal between the first sealing surface and the second sealing surface, the seal compression being generated by the first and the second sealing surface.