# US 11,111,593 B2 · Large scale manufacturing of hybrid nanostructured textile sensors

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- Number: US 11,111,593 B2
- Document ID: US11111593B2
- Status: Granted
- Kind: B2
- Application number: 14/995,334
- Filed: 2016-01-14
- Published: 2016-08-04
- Granted: 2021-09-07
- Earliest claimed: 2015-01-16
- Assignees: Nanowear Inc.
- Applicants: Nanowear Inc.
- Inventors: Vijay K. Varadan; Pratyush Rai; Se Chang Oh
- Web page: https://patentgrep.com/patent/US11111593B2

## CPC

- C25D 5/56: of plastics
- C23C 18/1641: {Organic substrates, e.g. resin, plastic}
- C23C 18/1692: {Heat-treatment}
- C23C 18/2086: {with use of organic or inorganic compounds other than metals, first}
- C23C 18/285: {Sensitising or activating with tin based compound or composition}
- C23C 18/44: using reducing agents
- B82Y 15/00: Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
- B82Y 30/00: Nanotechnology for materials or surface science, e.g. nanocomposites
- B82Y 40/00: Manufacture or treatment of nanostructures
- B82Y 99/00: Subject matter not provided for in other groups of this subclass
- C25D: PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES

## Abstract

A process for the large scale manufacturing of vertically standing hybrid nanometer-scale structures of different geometries, including fractal architecture made of flexible materials, on a flexible substrate including textiles is disclosed. The nanometer-scale structures increase the surface area of the substrate. The nanometer-scale structures may be coated with materials that are sensitive to various physical parameters or chemicals such as but not limited to temperature, humidity, pressure, atmospheric pressure, electromagnetic signals originating from biological or non-biological sources, volatile gases, and pH. The increased surface area achieved through the disclosed process is intended to improve the sensitivity of the sensors formed by coating of the nanometer-scale structure and substrate with a material which can be used to sense physical parameters and chemicals as listed previously. An embodiment with nanometer-scale structures on a textile substrate coated with a conductive, malleable and bio-compatible sensing material for use as a biopotential measurement electrode is provided.

## Claims

### Claim 1

A method of assembly line manufacturing comprising:
preparing a surface of a portion of a flexible or rigid fabric or substrate to achieve adhesion for a plurality of hybrid nanostructured articles;
depositing the plurality of said hybrid nanostructured articles;
providing electro/electromagnetic field to achieve random or fractal pattern of said plurality of hybrid nanostructured articles upon contacting the surface; and
selective removal of a part or whole of some of the deposited hybrid nanostructured articles
functionalization of the deposited hybrid nanostructured articles by electroless plating using at least one flow cell comprising a seal assembly, wherein the flow cell has a top plate and a bottom plate, and wherein the portion of the fabric or substrate is disposed between the top plate and the bottom plate and within the seal assembly so that the seal assembly provides a leak-proof clamp around the portion of the fabric, the top plate having an opening for receiving coating solution and air for said electroless plating.

### Claim 2 (depends on 1)

A method of claim 1, wherein the at least one flow cell includes a plurality of flow cells.

### Claim 3 (depends on 1)

The method of claim 1, wherein plurality of hybrid nanostructured articles are comprised of short length multi-component yarn made with a combination of functionalized long chain polymers, and wherein the long chain polymers are functionalized by said electroless plating.

### Claim 4 (depends on 3)

The method of claim 3, wherein the functionalized long chain polymers are polymers selected from the group consisting of polyester, nylon, polypropylene, polybutylene, polylactic acid, poly-acrylonitrile, polycarbonate, polyurethane, polyolefin, polyimide and polyaramid.

### Claim 5 (depends on 3)

The method of claim 3, wherein said step of providing electro/electromagnetic field further comprises applying an electrostatic field of 2 kV/cm-10 kV/cm.

### Claim 6 (depends on 3)

The method of claim 3, wherein said step of preparing the surface comprises applying an adhesive to the surface.

### Claim 7 (depends on 3)

The method of claim 3, wherein said step of selective removal includes selective removal using a suction head.

### Claim 8 (depends on 1)

The method of claim 1, wherein the fabric or substrate is flexible.

### Claim 9 (depends on 8)

The method of claim 8, wherein the flow cell has heating elements located in the top plate and the bottom plate of the flow cell.

### Claim 10 (depends on 8)

The method of claim 8, wherein the flow cell further comprises an aspiration stencil between the top plate and the flexible fabric or substrate, the aspiration stencil having flow channels for receiving coating solution and air.

### Claim 11 (depends on 10)

The method of claim 10, wherein the flow cell further comprises a sensor stencil and a back mesh, the flexible fabric or substrate located between the sensor stencil and the back mesh, the sensor stencil and back mesh forming a chamber, the chamber receiving coating solution and air via the aspiration stencil.

### Claim 12 (depends on 11)

The method of claim 11, wherein sensor stencil is the shape of a nanostructured region of the fabric to be functionalized for electrical conductivity.

### Claim 13 (depends on 10)

The method of claim 10, having more than one flow cell, wherein the flow cells are arranged to provide a multisensor array.

### Claim 14 (depends on 1)

The method of claim 1, wherein the seal assembly is comprised of a first seal assembly located between the top plate and the aspiration stencil and a second seal assembly located between the back mesh and the substrate.

### Claim 15 (depends on 10)

The method of claim 10, wherein the top plate and the bottom plate have heating elements for temperature control.

### Claim 16 (depends on 1)

The method of claim 1, wherein the flow cell has a heating element.

### Claim 17 (depends on 1)

The method of claim 1, having more than one flow cell wherein the flow cells are arranged at locations of functionalization for a multi-sensor assembly for a textile EKG monitoring system.

### Claim 18 (depends on 1)

The method of claim 1 wherein the step of preparing the surface includes providing a textile or polymer substrate with a surface pretreated with adhesive.

### Claim 19 (depends on 1)

The method of claim 1, wherein the electroless plating applies a conformal conductive thin film of silver onto the deposited hybrid nanostructured articles.
