# US 11,111,580 B2 · Apparatus for processing substrate

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- Number: US 11,111,580 B2
- Document ID: US11111580B2
- Status: Granted
- Kind: B2
- Application number: 15/973,241
- Filed: 2018-05-07
- Published: 2018-12-13
- Granted: 2021-09-07
- Earliest claimed: 2017-06-08
- Assignees: Eugene Technology Co., Ltd.
- Applicants: Eugene Technology Co., Ltd.
- Inventors: Sung Ho Kang; Chang Dol Kim; Sang Don Lee
- Web page: https://patentgrep.com/patent/US11111580B2

## CPC

- C23C 16/45546: {specially adapted for a substrate stack in the ALD reactor}
- C23C 16/4412: {Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps}
- C23C 16/45504: {Laminar flow}
- C23C 16/45578: {Elongated nozzles, tubes with holes}
- C23C 16/4584: {the substrate being rotated}
- C23C 16/46: characterised by the method used for heating the substrate (C23C16/48, C23C16/50 take precedence)
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)

## Abstract

The present disclosure relates to an apparatus for processing a substrate, and more particularly, to an apparatus for processing a substrate, which is capable of allowing a substrate processing gas to smoothly flow on the substrate. The apparatus for processing the substrate in accordance an exemplary embodiment may form a laminar flow through a gas supply unit disposed on one side of an inner reaction tube and an exhaust duct disposed on the other side of the inner reaction tube, which faces the gas supply unit, to extend up to the outside of an accommodation region of a pedestal in an accommodation space of the inner reaction tube and control a flow of a substrate processing gas supplied onto the substrate.

## Claims

### Claim 1

An apparatus for producing a substrate, comprising:
an outer tube having an inner space;
an inner reaction tube disposed to be spaced apart from an inner surface of the outer tube in the inner space of the outer tube and having an accommodation space therein;
a substrate boat in which a plurality of substrates are loaded in a multistage manner and accommodated in an upper portion of the accommodation space of the inner reaction tube during substrate processing;
a pedestal configured to support the substrate boat and accommodated in a lower portion of the accommodation space of the inner reaction tube during the substrate processing;
a gas supply unit disposed on one side of the inner reaction tube;
an exhaust duct vertically extending from the other side of the inner reaction tube to provide an inner passage communicating with an exhaust hole defined to pass through a sidewall of the inner reaction tube and disposed in a spaced space between the inner reaction tube and the outer tube to face the gas supply unit;
a baffle comprising an opening and disposed in the inner passage of the exhaust duct to correspond to a boundary between an accommodation region of the substrate boat and an accommodation region of the pedestal in the accommodation space of the inner reaction tube; and
an exhaust port communicating with a lower portion of the exhaust duct and disposed outside the exhaust duct to correspond to the accommodation region of the pedestal,
wherein the exhaust duct extends up to an outside of the accommodation region of the pedestal, and
wherein the exhaust hole comprises:
a first exhaust hole defined to correspond to the accommodation region of the substrate boat; and
a second exhaust hole defined to correspond to the accommodation region of the pedestal and disposed at the other side of the inner reaction tube,
wherein the second exhaust hole faces the exhaust port.

### Claim 2 (depends on 1)

The apparatus of claim 1, wherein the first exhaust hole and the second exhaust hole are defined to be spaced apart from each other.

### Claim 3 (depends on 1)

The apparatus of claim 1, wherein the exhaust hole has a slit shape extending in a circumferential direction of the inner reaction tube or a shape in which a plurality of through-holes are arranged along a circumference of the inner reaction tube.

### Claim 4 (depends on 1)

The apparatus of claim 1, further comprising a heating unit vertically extending outside the inner reaction tube to heat the inner reaction tube and extending up to the outside of the accommodation region of the pedestal.

### Claim 5 (depends on 1)

The apparatus of claim 1, wherein the pedestal comprises a plurality of thermal blocking plates spaced apart from each other and disposed in a multistage manner.

### Claim 6 (depends on 1)

The apparatus of claim 1, wherein the gas supply unit comprises a plurality of gas distribution lines vertically extending to distribute a supplied substrate processing gas or inert gas,
the plurality of gas distribution lines are disposed in a line along a circumference of the inner reaction tube to form a gas distribution line array, and
the inert gas is supplied to the plurality of gas distribution lines, which are symmetrical to each other with respect to a center of the gas distribution line array.

### Claim 7 (depends on 6)

The apparatus of claim 6, wherein the substrate processing gas is supplied to the gas distribution line disposed between the plurality of gas distribution lines, which are symmetrical to each other.

### Claim 8 (depends on 6)

The apparatus of claim 6, wherein a flow rate of the inert gas is adjusted in accordance with a distance between an inner surface of the inner reaction tube and a side portion of the substrate boat.

### Claim 9 (depends on 6)

The apparatus of claim 6, wherein the substrate processing gas comprises a source gas for forming a thin film and a reaction gas reacting with the source gas, and
the source gas and the reaction gas are sequentially supplied.

### Claim 10 (depends on 6)

The apparatus of claim 6, wherein the substrate processing gas comprises a source gas for forming a thin film and a reaction gas reacting with the source gas, and
the source gas and the reaction gas are separated from each other so as to be respectively supplied to the gas distribution lines different from each other.

### Claim 11 (depends on 6)

The apparatus of claim 6, wherein the gas supply unit further comprises a plurality of injection nozzles disposed on a circumferential surface of the gas distribution line and disposed in a line in a longitudinal direction of the gas distribution line, and
an internal pressure difference of the gas distribution line in the longitudinal direction is within a predetermined range during the substrate processing.

### Claim 12 (depends on 1)

The apparatus of claim 1, wherein a material of the exhaust duct comprises quartz, and
the exhaust duct and the inner reaction tube are provided as one body.