# US 11,111,572 B2 · Vapor deposition mask > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,111,572 B2 - Document ID: US11111572B2 - Status: Granted - Kind: B2 - Application number: 16/693,454 - Filed: 2019-11-25 - Published: 2020-03-26 - Granted: 2021-09-07 - Earliest claimed: 2017-06-28 - Assignees: Japan Display Inc. - Applicants: Japan Display Inc. - Inventors: Noriyoshi Kanda; Takeshi Ookawara; Mitsugu Tamekawa - Web page: https://patentgrep.com/patent/US11111572B2 ## CPC - C23C 14/042: {using masks} - H05B 33/10: Apparatus or processes specially adapted to the manufacture of electroluminescent light sources - H10K 71/166: {using selective deposition, e.g. using a mask} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL - H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES ## Abstract A vapor deposition mask includes a frame and a metal film supported by the frame, wherein the metal film includes a mask region arranged with a plurality of pixel opening parts corresponding to a display region of a display device, and an alignment region arranged in a periphery of the mask region, the alignment region includes a first opening part and a plurality of second opening parts arranged in a periphery of the first opening part, and a maximum width of the second opening part is smaller than a maximum width of the first opening part. ## Claims ### Claim 1 A vapor deposition mask comprising: a frame; and a metal film supported by the frame, wherein the metal film includes a mask region corresponding to a display region of a display device and the mask region is arranged with a plurality of pixel opening parts, and an alignment region arranged in a periphery of the mask region, the alignment region includes a first opening part and a plurality of second opening parts arranged in a periphery of the first opening part, a maximum width of the second opening part is smaller than a maximum width of the first opening part, a plurality of third opening parts arranged further to the outer side than the plurality of second opening parts with respect to the first opening part, and the plurality of second opening parts and the plurality of third opening parts are alternately arranged in a clockwise or counterclockwise direction along an outline of the first opening part. ### Claim 2 (depends on 1) The vapor deposition mask according to claim 1, wherein the plurality of second opening parts is arranged along an outline of the first opening part. ### Claim 3 (depends on 1) The vapor deposition mask according to claim 1, wherein the plurality of third opening parts is arranged along an outline of the plurality of first opening parts. ### Claim 4 (depends on 1) The vapor deposition mask according to claim 1, wherein the plurality of second opening parts is arranged in a position separated by a larger distance than the maximum width of the first opening part from an edge of the first opening part. ### Claim 5 (depends on 1) The vapor deposition mask according to claim 1, wherein an outline of the first opening part is circular. ### Claim 6 (depends on 1) The vapor deposition mask according to claim 1, wherein a film thickness of the metal film is 5 μm to 20 μm. ### Claim 7 (depends on 1) The vapor deposition mask according to claim 1, wherein a maximum width of the first opening part is 0.5 mm or more. ### Claim 8 A vapor deposition mask comprising: a frame; and a metal film supported by the frame, wherein the metal film includes a mask region corresponding to a display region of a display device and the mask region is arranged with a plurality of pixel opening parts, and an alignment region arranged in a periphery of the mask region, the alignment region includes a first opening part and a plurality of second opening parts arranged in a periphery of the first opening part, a maximum width of the second opening part is smaller than a maximum width of the first opening part, and the plurality of second opening parts is arranged in a position separated by a larger distance than the maximum width of the first opening part from an edge of the first opening part. ### Claim 9 (depends on 8) The vapor deposition mask according to claim 8, wherein the plurality of second opening parts is arranged along an outline of the first opening part. ### Claim 10 (depends on 8) The vapor deposition mask according to claim 8, further comprising: a plurality of third opening parts arranged further to the outer side than the plurality of second opening parts with respect to the first opening part. ### Claim 11 (depends on 10) The vapor deposition mask according to claim 10, wherein the plurality of third opening parts is arranged along an outline of the plurality of first opening parts. ### Claim 12 (depends on 8) The vapor deposition mask according to claim 8, wherein an outline of the first opening part is circular. ### Claim 13 (depends on 8) The vapor deposition mask according to claim 8, wherein a film thickness of the metal film is 5 μm to 20 μm. ### Claim 14 (depends on 8) The vapor deposition mask according to claim 8, wherein a maximum width of the first opening part is 0.5 mm or more.