US 11,111,133 B1Granted

MEMS actuators with improved performance and cooling

AssigneeMirrorcle Technologies, Inc.

InventorVeljko Milanovic

Life of this patent

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Abstract

A MEMS device includes a movable mirror and a solid material below the mirror that removes more heat from the mirror and creates more viscous drag than if the solid material were absent while allowing free movement of the mirror. A MEMS system includes a movable mirror, transparent window, electronic package, and a fluid-tight cavity between the window and the electronic package filled with a fluid exhibiting higher thermal conductivity than air. Another system has a reflective movable mirror, transparent window, and a lid that holds the window close to the mirror without obstructing its free movement. There is greater vertical clearance between the MEMS system and lid than between the mirror and MEMS system. Another MEMS device has a movable mirror and a surrounding substrate coplanar to the mirror. A gap between the mirror and substrate is filled with fluid. Finger structures extend from the mirror into the gap.

Claims13

Dependent claims

A MEMS micromirror device comprising:

a reflective movable mirror
an actuator connected to the reflective movable mirror configured to actuate the mirror in one or more degrees of freedom
a substrate to which the actuator is attached
a solid material positioned below the reflective movable mirror configured to remove more heat from the reflective movable mirror than would be removed from the reflective movable mirror if the solid material was absent, wherein the solid material is positioned below the reflective movable mirror but not supporting the reflective movable mirror, wherein an upper section of the solid material is conical, pyramidal, or a flat-topped cylinder, wherein there is no solid material between the upper section and a bottom surface of the reflective movable mirror, wherein there is a clearance gap between the solid material and the reflective movable mirror, wherein the solid material is configured to cause viscous drag during motion of the reflective movable mirror as an atmospheric fluid is expelled from or drawn into the clearance gap between the solid material and the bottom surface of the reflective moveable mirror.

1 more element

Dependencies are inferred from the claim text.

Facts

Application: 15/882,859Filed 29 Jan 2018 · us provisional application
Priority: 30 Jan 2017
Granted: 7 Sep 2021
Term ends: Not estimatedThe source records don’t support an estimate.

Classification12 codes

B81B 7/0051
For reducing stress inside of the package structure: between the package lid and the substrate
G02B 7/181
For prisms; for mirrors: with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
B81B 3/0035
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes: constitution or structural means for controlling…
B81B 3/0078
Mechanical properties: constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075