# US 11,110,452 B2 · Multilayer fluidic devices and methods for their fabrication

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- Number: US 11,110,452 B2
- Document ID: US11110452B2
- Status: Granted
- Kind: B2
- Application number: 16/026,847
- Filed: 2018-07-03
- Published: 2019-01-03
- Granted: 2021-09-07
- Earliest claimed: 2018-02-22
- Assignees: Illumina, Inc.
- Applicants: Illumina, Inc.
- Inventors: Jeffrey S. Fisher; John A. Moon; Bala Murali Venkatesan
- Web page: https://patentgrep.com/patent/US11110452B2

## CPC

- B01L 3/502707: {characterised by the manufacture of the container or its components}
- B29C 65/1435: {at least passing through one of the parts to be joined, i.e. transmission welding}
- B29C 65/1467: {at the same time, i.e. simultaneous welding}
- B29C 65/1477: {making use of an absorber or impact modifier (B29C65/1677 takes precedence)}
- B29C 65/1483: {coated on the article}
- B29C 65/1635: {at least passing through one of the parts to be joined, i.e. laser transmission welding}
- B29C 65/1677: {making use of an absorber or impact modifier}
- B29C 65/1683: {coated on the article}
- B29C 66/112: {Single lapped joints}
- B29C 66/1122: {Single lap to lap joints, i.e. overlap joints (B29C66/45, B29C66/472, B29C66/52272 take precedence)}
- B29C 66/114: {Single butt joints}
- B29C 66/45: {Joining of substantially the whole surface of the articles (methods or apparatus for laminating B32B37/00)}
- B29C 66/53461: {joining substantially flat covers and/or substantially flat bottoms to open ends of container bodies}
- B29C 66/71: {characterised by the composition of the plastics material of the parts to be joined (welding bar compositions B29C65/125)}
- B29C 66/72326: {Glass}
- B29C 66/739: {characterised by the material of the parts to be joined being a thermoplastic or a thermoset}
- B29C 66/746: {to inorganic materials not provided for in groups B29C66/742 - B29C66/744}
- B29C 66/7465: {Glass}
- B81C 1/00071: {Channels}
- B81C 3/001: {Bonding of two components}
- C12Q 1/6874: involving nucleic acid arrays, e.g. sequencing by hybridisation
- B01L 2200/0689: Sealing
- B01L 2200/12: Specific details about manufacturing devices
- B01L 2300/0645: Electrodes
- B01L 2300/0816: Cards, e.g. flat sample carriers usually with flow in two horizontal directions
- B01L 2300/0877: Flow chambers
- B01L 2300/0887: Laminated structure
- B01L 2300/12: Specific details about materials
- B29C 65/1409: {Visible light radiation}
- B29C 65/1606: {Ultraviolet [UV] radiation, e.g. by ultraviolet excimer lasers}
- B29C 65/1609: {Visible light radiation, e.g. by visible light lasers}
- B29C 65/1612: {Infrared [IR] radiation, e.g. by infrared lasers}
- B29C 65/1654: {scanning at least one of the parts to be joined}
- B29C 65/8223: {Peel tests}
- B29C 65/8246: {Pressure tests, e.g. hydrostatic pressure tests}
- B29C 66/026: {Chemical pre-treatments (B29C66/028 takes precedence)}
- B29C 66/028: {Non-mechanical surface pre-treatments, i.e. by flame treatment, electric discharge treatment, plasma treatment, wave energy or particle radiation (B29C65/14 takes precedence; non-mechanical surface treatment of plastics in general B29C59/08 - B29C59/16)}
- B29C 66/72321: {consisting of metals or their alloys}
- B29C 66/72325: {Ceramics}
- B29C 66/7392: {characterised by the material of at least one of the parts being a thermoplastic}
- B29C 66/7394: {characterised by the material of at least one of the parts being a thermoset}
- B29K 2507/04: Carbon
- B29L 2009/005: {coated}
- B29L 2031/34: Electrical apparatus, e.g. sparking plugs or parts thereof
- B29L 2031/756: {Microarticles, nanoarticles}
- B81B 2201/058: Microfluidics not provided for in B81B2201/051 - B81B2201/054
- B81C 2201/019: Bonding or gluing multiple substrate layers
- B81C 2203/035: Soldering
- B01L: CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B29C: SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING (making preforms B29B11/00; making laminated products by combining previously unconnected layers which become one product whose layers will remain together B32B37/00 - B32B41/00)
- B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01)
- C12Q: MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS (immunoassay G01N33/53); COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
- B29K: INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR {MOULDS, } REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29L: INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00)

## Abstract

A method of making a flowcell includes bonding a first surface of an organic solid support to a surface of a first inorganic solid support via a first bonding layer, wherein the organic solid support includes a plurality of elongated cutouts. The method further includes bonding a surface of a second inorganic solid support to a second surface of the organic solid support via a second bonding layer, so as to form the flowcell. The formed flowcell includes a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts.

## Claims

### Claim 1

A method of making a flowcell, the method comprising:
bonding a first surface of an organic solid support to a surface of a first inorganic solid support via a first bonding layer formed of a radiation-absorbing material, wherein the organic solid support includes a plurality of elongated cutouts; and
bonding a surface of a second inorganic solid support to a second surface of the organic solid support via a second bonding layer formed of the radiation-absorbing material, so as to form the flowcell;
wherein:
the formed flowcell comprises a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts;
prior to bonding the first surface of the organic solid support to the surface of the first inorganic solid support, the method further comprises:
coating the surface of the first inorganic solid support with (3-aminopropyl)-triethoxysilane (APTES) to form an amino silane layer; and
reacting amino groups of the amino silane layer with N-Hydroxysuccinimidyl-4-azidosalicylic Acid (HSAB) to form a phenyl azide layer; and
wherein prior to bonding the surface of the second inorganic solid support to the second surface of the organic solid support, the method further comprises:
coating the surface of the second inorganic solid support with (3-aminopropyl)-triethoxysilane (APTES) to form a second amino silane layer; and
reacting amino groups of the second amino silane layer with N-Hydroxysuccinimidyl-4-azidosalicylic Acid (HSAB) to form a second phenyl azide layer.

### Claim 2 (depends on 1)

The method of claim 1, wherein:
bonding the first surface of the organic solid support to the surface of the first inorganic solid support comprises irradiating the first bonding layer with a laser; and
bonding the surface of the second inorganic solid support to the second surface of the organic solid support comprises irradiating the second bonding layer with the laser.

### Claim 3 (depends on 2)

The method of claim 2, wherein:
in irradiating the first bonding layer with the laser, the first bonding layer is irradiated in a predetermined bonding pattern so as to avoid regions of the first bonding layer corresponding to the elongated cutouts of the organic solid support; and
in irradiating the second bonding layer with the laser, the second bonding layer is irradiated in a predetermined bonding pattern so as to avoid regions of the second bonding layer corresponding to the elongated cutouts of the organic solid support.

### Claim 4 (depends on 2)

The method of claim 2, wherein the organic solid support comprises a polyimide that contains carbon black, and wherein each of the polyimide and the carbon black absorbs radiation emitted by the laser used in the bonding.

### Claim 5 (depends on 1)

The method of claim 1, wherein each of the first and second inorganic solid supports is made of silica or a silica-based material.

### Claim 6 (depends on 1)

The method of claim 1, wherein each of the first and second inorganic solid supports comprises a plurality of wells, and each well contains a gel material.

### Claim 7

A method of making a flowcell, the method comprising:
bonding a first surface of an organic solid support to a surface of a first inorganic solid support via a first bonding layer, wherein the organic solid support includes a plurality of elongated cutouts;
bonding a surface of a second inorganic solid support to a second surface of the organic solid support via a second bonding layer, so as to form the flowcell;
wherein the formed flowcell comprises a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts;
and wherein each of the first and second inorganic solid supports comprises a plurality of wells, and each well contains a gel material that comprises a poly(N-(5-azidoacetamidylpentyl)acrylamide-co-acrylamide (PAZAM) polymer.

### Claim 8

A method of making a flowcell, the method comprising:
bonding a first surface of an organic solid support to a surface of a first inorganic solid support via a first bonding layer;
after bonding the first surface of the organic solid support to the surface of the first inorganic solid support, patterning the organic solid support so as to form a patterned organic solid support including a plurality of elongated cutouts in the organic solid support; and
bonding a surface of a second inorganic solid support to a second surface of the patterned organic solid support via a second bonding layer, so as to form the flowcell;
wherein the formed flowcell comprises a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts.

### Claim 9 (depends on 8)

The method of claim 8, wherein:
each of the first and second bonding layers is formed of a radiation-absorbing material;
bonding the first surface of the organic solid support to the surface of the first inorganic solid support comprises irradiating the first bonding layer with a laser; and
bonding the surface of the second inorganic solid support to the second surface of the patterned organic solid support comprises irradiating the second bonding layer with the laser.

### Claim 10 (depends on 9)

The method of claim 9, wherein:
in irradiating the first bonding layer with the laser, the first bonding layer is irradiated in a predetermined bonding pattern so as to avoid regions of the first bonding layer at which the elongated cutouts are to be formed in the organic solid support;
in patterning the organic solid support, the elongated cutouts are formed by cutting a pattern for the elongated cutouts in the organic solid support, and removing portions of the organic solid support at regions corresponding to the regions of the first bonding layer that were avoided when irradiating the first bonding layer with the laser.

### Claim 11 (depends on 8)

The method of claim 8, wherein each of the first and second inorganic solid supports is made of silica or a silica-based material.

### Claim 12 (depends on 8)

The method of claim 8, wherein:
bonding the first surface of the organic solid support to the surface of the first inorganic solid support comprises irradiating the first bonding layer with a laser;
bonding the surface of the second inorganic solid support to the second surface of the organic solid support comprises irradiating the second bonding layer with the laser; and
the organic solid support comprises a polyimide that contains carbon black, and each of the polyimide and the carbon black absorbs radiation emitted by the laser.

### Claim 13 (depends on 8)

The method of claim 8, wherein each of the inorganic solid supports comprises a plurality of wells, and each well contains a gel material.

### Claim 14

A method of making a flowcell, the method comprising:
bonding a first surface of an organic solid support to a surface of a first inorganic solid support via a first bonding layer;
after bonding the first surface of the organic solid support to the surface of the first inorganic solid support, patterning the organic solid support so as to form a plurality of elongated cutouts in the organic solid support;
bonding a surface of a second inorganic solid support to a second surface of the patterned organic solid support via a second bonding layer, so as to form the flowcell;
wherein the formed flowcell comprises a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts;
and wherein each of the inorganic solid supports comprises a plurality of wells, and each well contains a gel material comprising a poly(N-(5-azidoacetamidylpentyl)acrylamide-co-acrylamide (PAZAM) polymer.

### Claim 15

A flowcell comprising:
a first inorganic solid support;
a second inorganic solid support;
an organic solid support, wherein the organic solid support includes a plurality of elongated cutouts;
a first bonding layer bonding a first surface of the organic solid support to a surface of the first inorganic solid support, wherein the first bonding layer comprises a first chemically reactive layer of a silane or phenyl azide; and
a second bonding layer bonding a surface of the second inorganic solid support to a second surface of the organic solid support, wherein the second bonding layer comprises a second chemically reactive layer of the silane or phenyl azide;
wherein the organic solid support includes a radiation-absorbing material;
wherein the flowcell comprises a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts.

### Claim 16 (depends on 15)

The flowcell of claim 15, wherein:
each of the first and second inorganic solid supports is made of silica or a silica-based material;
and the radiation-absorbing material comprises a polyimide that contains carbon black.

### Claim 17 (depends on 15)

The flowcell of claim 15, wherein each of the inorganic solid supports comprises a plurality of wells, and each well contains a gel material.

### Claim 18

A flowcell comprising:
a first inorganic solid support;
a second inorganic solid support;
an organic solid support, wherein the organic solid support includes a plurality of elongated cutouts;
a first bonding layer bonding a first surface of the organic solid support to a surface of the first inorganic solid support; and
a second bonding layer bonding a surface of the second inorganic solid support to a second surface of the organic solid support;
wherein the flowcell comprises a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts;
and wherein each of the inorganic solid supports comprises a plurality of wells, and each well contains a gel material comprising a poly(N-(5-azidoacetamidylpentyl)acrylamide-co-acrylamide (PAZAM) polymer.

### Claim 19

A method of making a flowcell, the method comprising:
bonding a first surface of an organic solid support to a surface of a first inorganic solid support via a first bonding layer formed of a radiation-absorbing material, wherein the organic solid support includes a plurality of elongated cutouts; and
bonding a surface of a second inorganic solid support to a second surface of the organic solid support via a second bonding layer formed of the radiation-absorbing material, so as to form the flowcell;
wherein:
the formed flowcell comprises a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts;
prior to bonding the first surface of the organic solid support to the surface of the first inorganic solid support, the method further comprises:
coating the surface of the first inorganic solid support with indium tin oxide;
plasma treating the indium tin oxide to enrich it with hydroxyl groups;
performing a vapor phase silanization with (3-aminopropyl)-trimethoxysilane to covalently link the hydroxyl groups to the (3-aminopropyl)-trimethoxysilane to form a silane layer; and
baking to crosslink the silane layer;
prior to bonding the surface of the second inorganic solid support to the second surface of the organic solid support, the method further comprises:
coating the surface of the second inorganic solid support with indium tin oxide;
plasma treating the indium tin oxide to enrich it with hydroxyl groups;
performing a vapor phase silanization with (3-aminopropyl)-trimethoxysilane to covalently link the hydroxyl groups to the (3-aminopropyl)-trimethoxysilane to form a second silane layer; and
baking to crosslink the second silane layer.