# US 11,110,451 B2 · Micro-channel device and method for manufacturing micro-channel device

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- Number: US 11,110,451 B2
- Document ID: US11110451B2
- Status: Granted
- Kind: B2
- Application number: 15/761,167
- Filed: 2016-07-13
- Published: 2018-09-13
- Granted: 2021-09-07
- Earliest claimed: 2015-09-30
- Assignees: Sony Corporation
- Applicants: Sony Corporation
- Inventors: Yuichi Aki; Masaru Fujii; Toshihiro Nakajima; Masanori Okazaki; Tomomi Yukumoto
- Web page: https://patentgrep.com/patent/US11110451B2

## CPC

- B01L 3/502707: {characterised by the manufacture of the container or its components}
- B01L 3/50273: {characterised by the means or forces applied to move the fluids}
- B01L 3/502738: {characterised by integrated valves (throttle valves in microfluidic sample containers B01L3/502746)}
- G01N 35/08: using a stream of discrete samples flowing along a tube system, e.g. flow injection analysis
- G01N 37/00: Details not covered by any other group of this subclass
- B01L 2200/12: Specific details about manufacturing devices
- B01L 2300/0887: Laminated structure
- B01L 2300/123: Flexible; Elastomeric
- B01L: CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

To provide a high-quality and high-performance micro-channel device which can be manufactured by a simple method. Provided is a micro-channel device used in analyzing a sample. The micro-channel device includes at least two substrates and an elastic film interposed between the two substrates. The substrates are thermally fused to the elastic film in at least a part thereof. Also provided is a method for manufacturing a micro-channel device used in analyzing a sample. The method includes a surface activation step of activating a joining surface of a substrate and/or an elastic film, a lamination step of laminating the elastic film between at least two of the substrates, and a thermal fusion step of thermally fusing the substrates to the elastic film in at least a part thereof.

## Claims

### Claim 1

A method for manufacturing a micro-channel device, comprising:
controlling an irradiation amount of an ultraviolet ray generated by an ozone less low pressure ultraviolet lamp, wherein the ozone less low pressure ultraviolet lamp is configured to emit the ultraviolet ray without generation of ozone;
controlling an ozone concentration of an ozone atmosphere independent of the irradiation amount of the ultraviolet ray, wherein the ozone atmosphere is generated by an ozone generator;
activating a joining surface of at least one of a first substrate or an elastic film by irradiation of the joining surface with the ultraviolet ray in the ozone atmosphere, wherein the irradiation is based on the irradiation amount of the ultraviolet ray and the ozone concentration;
laminating the elastic film between the first substrate and a second substrate; and
thermally fusing at least a part of the first substrate and a part of the second substrate to at least a part of the elastic film based on the activation.

### Claim 2 (depends on 1)

The method according to claim 1, wherein the ultraviolet ray has a wavelength of at least 200 nm.

### Claim 3 (depends on 1)

The method according to claim 1, further comprising masking a specific part of one of the first substrate or the elastic film other than the joining surface at a time of the activation of the joining surface.

### Claim 4 (depends on 1)

The method according to claim 1, further comprising flattening one of the first substrate or the elastic film before the lamination of the elastic film between the first substrate and the second substrate.

### Claim 5 (depends on 1)

The method according to claim 1, further comprising masking, at a time of the activation, a portion of the elastic film that is configured to serve as one of a valve or a pump, wherein
the masked portion of the elastic film is not thermally fused to the first substrate and the second substrate, and
the masked portion of the elastic film serves as one of the valve or the pump.
