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US 11,110,383 B2Granted
Gas abatement apparatus
AssigneeApplied Materials, Inc.
InventorsAdib Khan, Qiwei Liang, Sultan Malik, Srinivas Nemani, Rafika Smati, Joseph Ng, John O'Hehir
Life of this patent
Estimating the term…
Abstract
Embodiments of the present disclosure relate to gas abatement apparatus and effluent management. The apparatus described herein include a high pressure process chamber and a containment chamber surrounding the process chamber. A high pressure fluid delivery module is in fluid communication with the high pressure process chamber and is configured to deliver a high pressure fluid to the process chamber. An effluent management module includes a muffler assembly to effluent pressure reduction and a plurality of scrubbers provide for treatment of effluent.
Claims23
A muffler assembly apparatus, comprising:
- a first muffler defining a first volume therein, the first muffler having a first port formed in a first end and a second port formed in a second end opposite the first port;
- a second muffler defining a second volume therein, the second muffler having a third port formed in a third end and a fourth port formed in the second muffler opposite the third port;
- a third muffler defining a third volume therein, the third muffler having a fifth port formed therein and a sixth port formed therein opposite the fifth port;
- a fourth muffler defining a fourth volume therein, the fourth muffler having a seventh port formed therein and an eighth port formed through a fourth end opposite the seventh port;
- a first conduit extending between the seventh port and the fifth port;
- a second conduit extending between the fourth port and the sixth port;
- an exhaust conduit;
- a pump coupled to the exhaust conduit;
- a third conduit extending from the first muffler to the exhaust conduit;
- and
- a fourth conduit extending from the pump to the fourth muffler.
8 more elements
An effluent management apparatus, comprising:
- a muffler assembly, comprising:
- a first muffler defining a first volume therein;
- a second muffler defining a second volume therein;
- a third muffler defining a third volume therein;
- a fourth muffler defining a fourth volume therein;
- a first conduit extending between the fourth muffler and the third muffler;
- and
- a second conduit extending between the second muffler and the third muffler;
- a valve;
- a third conduit extending between the second muffler and the valve;
- a first scrubber in fluid communication with the valve;
- and
- a second scrubber in fluid communication with the valve via a fourth conduit, wherein a flow restrictor is disposed on the fourth conduit between the valve and the second scrubber.
10 more elements
A high-pressure processing apparatus, comprising:
- a first chamber;
- a second chamber defining a process volume therein, the second chamber disposed within the first chamber;
- a muffler assembly, comprising:
- a first muffler defining a first volume therein;
- a second muffler defining a second volume therein;
- a third muffler defining a third volume therein;
- a fourth muffler defining a fourth volume therein;
- a first conduit extending between the fourth muffler and the third muffler;
- and
- a second conduit extending between the second muffler and the third muffler;
- a valve;
- a third conduit extending between the second muffler and the valve;
- a first scrubber in fluid communication with the valve;
- an exhaust conduit extending from the first chamber;
- a pump coupled to the exhaust conduit;
- a fourth conduit extending from the first muffler to the exhaust conduit;
- and
- a fifth conduit extending from the pump to the fourth muffler.
15 more elements
An effluent management apparatus, comprising:
- a muffler assembly, comprising:
- a first muffler defining a first volume therein;
- a second muffler defining a second volume therein;
- a third muffler defining a third volume therein;
- a fourth muffler defining a fourth volume therein;
- a first conduit extending between the fourth muffler and the third muffler;
- and
- a second conduit extending between the second muffler and the third muffler;
- a valve;
- a third conduit extending between the second muffler and the valve;
- a first scrubber in fluid communication with the valve;
- an exhaust conduit;
- a pump coupled to the exhaust conduit;
- a fourth conduit extending from the first muffler to the exhaust conduit;
- and
- a fifth conduit extending from the pump to the fourth muffler.
13 more elements
A high-pressure processing apparatus, comprising:
- a first chamber;
- a second chamber defining a process volume therein, the second chamber disposed within the first chamber;
- a muffler assembly, comprising:
- a first muffler defining a first volume therein;
- a second muffler defining a second volume therein;
- a third muffler defining a third volume therein;
- a fourth muffler defining a fourth volume therein;
- a first conduit extending between the fourth muffler and the third muffler;
- and
- a second conduit extending between the second muffler and the third muffler;
- a valve;
- a third conduit extending between the second muffler and the valve;
- a first scrubber in fluid communication with the valve;
- a first slit valve formed in the second chamber;
- and
- a first slit valve door coupled to an internal surface of the second chamber.
13 more elements
A high-pressure processing apparatus, comprising:
- a first chamber;
- a second chamber defining a process volume therein, the second chamber disposed within the first chamber;
- a muffler assembly, comprising:
- a first muffler defining a first volume therein;
- a second muffler defining a second volume therein;
- a third muffler defining a third volume therein;
- a fourth muffler defining a fourth volume therein;
- a first conduit extending between the fourth muffler and the third muffler;
- and
- a second conduit extending between the second muffler and the third muffler;
- a valve;
- a third conduit extending between the second muffler and the valve;
- a first scrubber in fluid communication with the valve;
- a first slit valve formed in the first chamber;
- and
- a first slit valve door coupled to an external surface of the first chamber.
13 more elements
Dependencies are inferred from the claim text.