Extreme ultraviolet generation apparatus

An extreme ultraviolet generation apparatus comprising:

• a chamber;
• a droplet generator configured to provide a droplet into the chamber;
• a shroud which extends along a movement path of the droplet inside the chamber and surrounds the movement path of the droplet;
• a charging unit which is disposed in the shroud and configured to charge the droplet;
• an alignment unit comprising at least one electromagnet exposed to an inner circumferential surface of the shroud, the alignment unit disposed in the shroud and configured to correct a position of the charged droplet using the at least one electromagnet;
• and
• a light source configured to provide a laser light to the charged droplet.

An extreme ultraviolet generation apparatus comprising:

• a chamber;
• a droplet generator configured to provide a droplet into the chamber;
• a shroud which extends along a movement path of the droplet inside the chamber and surrounds the movement path of the droplet;
• a charging unit configured to charge the droplet;
• a monitoring unit configured to measure a position of the charged droplet using an electric field;
• an alignment unit comprising at least one electromagnet, the alignment unit disposed between an outer circumferential surface of the shroud and an inner circumferential surface of the shroud and configured to correct the position of the charged droplet using the at least one electromagnet;
• an acceleration unit comprising an acceleration electrode, the acceleration unit configured to accelerate the charged droplet, after the position of the charged droplet has been corrected, using the acceleration electrode;
• and
• a light source configured to pretreat the charged droplet by providing a first laser light to the charged droplet reaching a first position inside the chamber and further configured to generate a plasma by providing a second laser light to the charged droplet reaching a second position farther away from the droplet generator than the first position,
• wherein the charging unit, the monitoring unit, the alignment unit, and the acceleration unit are sequentially disposed in the shroud along the movement path of the droplet.