Modular LED heater
AssigneeApplied Materials, Inc.
InventorPaul E. Pergande
Life of this patent
Estimating the term…
Abstract
A modular LED heater and an LED array are disclosed. The modular LED heater comprises a base having one or more internal conduits through which a coolant fluid may flow. The base also includes a plumbing port on one side wall of the base and a recessed port on an opposite side of the base. These ports are configured such that the plumbing port of one modular LED heater can be inserted into the recessed port of the adjacent modular LED heater to form a fluid-tight seal. A printed circuit board having a plurality of LEDs is disposed on the front surface of the base. Further, in some embodiments, the base includes one or more wedge clamps on its side walls used to lock the modular LED heater to an adjacent modular LED heater. An LED array may be created by assembling a plurality of these modular LED heaters.
Claims20
A modular light emitting diode (LED) heater, comprising:
- a base having a conduit for coolant fluid to pass through, the conduit in communication with a plumbing port and a recessed port, wherein the plumbing port is adapted to enter into the recessed port of an adjacent modular LED heater;
- a printed circuit board disposed on a front surface of the base comprising a plurality of LEDs;
- and
- power feedthroughs, passing through the base and in communication with the printed circuit board to supply power to the LEDs.
An LED array, comprising:
- a plurality of modular LED heaters, which are nested together, wherein each modular LED heater comprises:
- a base having a conduit for coolant fluid to pass through, the conduit in communication with a plumbing port and a recessed port;
- a printed circuit board disposed on a front surface of the base comprising a plurality of LEDs;
- and
- power feedthroughs, passing through the base and in communication with the printed circuit board to supply power to the LEDs;
- wherein the plumbing port of a modular LED heater enters the recessed port of an adjacent modular LED heater and forms a fluid-tight seal, wherein the modular LED heater and the adjacent modular LED heater form a fluid path.
A processing chamber, comprising:
- a workpiece support to hold a workpiece;
- a LED array disposed in the processing chamber, the LED array comprising:
- a plurality of modular LED heaters;
- wherein each of the plurality of modular LED heaters comprises:
- a base having a conduit for coolant fluid to pass through, the conduit in communication with a plumbing port and a recessed port, wherein the plumbing port of a modular LED heater enters the recessed port of an adjacent modular LED heater and forms a fluid-tight seal, wherein the modular LED heater and the adjacent modular LED heater form a fluid path;
- a printed circuit board disposed on a front surface of the base comprising a plurality of LEDs;
- and
- power feedthroughs, passing through the base and in communication with the printed circuit board to supply power to the LEDs;
- and a cooler in communication with each fluid path to remove heat from the coolant fluid as it exits the LED array and recirculate the coolant fluid.
Dependencies are inferred from the claim text.