MEMS microphone

A MEMS microphone, comprising a packaging structure that is enveloped by a PCB substrate and a housing, wherein the packaging structure is provided with a MEMS acoustoelectric chip therein, and the PCB substrate is provided with a sound port at a position that is corresponding to the MEMS acoustoelectric chip, wherein, the MEMS microphone further comprises a filter, and the filter is embedded into a back cavity of the MEMS acoustoelectric chip, the filter and the PCB substrate have a lateral hole therebetween, and the lateral hole serves as a sound channel that is used by the MEMS acoustoelectric chip to gather sound;

• wherein, the filter comprises a top plate and a bottom anchor that are connected together;
• the top plate is directly facing the sound port;
• and the bottom anchor supports the top plate, and is electrically connected to the PCB substrate, and the top plate and the PCB substrate have the lateral hole therebetween,
• wherein, the lateral hole is further provided with a filtering screen, and the filtering screen is formed by pillars on the top plate of the filter,
• wherein, the top plate of the filter is provided with a row of the pillars, to form the filtering screen of a single-layer structure.