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US 11,108,376 B2Granted
Acoustic resonator structure having an electrode with a cantilevered portion
AssigneeAvago Technologies International Sales Pte. Limited
InventorsJohn Choy, Chris Feng, Phil Nikkel
Life of this patent
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Abstract
An acoustic resonator is disclosed. The acoustic resonator comprises a substrate, a first electrode, a second electrode and a piezoelectric layer positioned between the first electrode and the second electrode. An acoustic reflector is positioned between the first electrode and the substrate. An active area comprises a region of contacting overlap of the acoustic reflector, the first electrode, the piezoelectric layer and the second electrode. A gap region extends around the active area.
Claims20
An acoustic resonator, comprising:
- a substrate;
- a first electrode;
- a second electrode;
- a piezoelectric layer positioned between the first electrode and the second electrode;
- an acoustic reflector positioned between the first electrode and the substrate;
- an active area comprising the acoustic reflector, the first electrode overlapping and in contact with the acoustic reflector, the piezoelectric layer overlapping and in contact with the first electrode, and the second electrode overlapping and in contact with the piezoelectric layer, wherein a gap region extends around the active area;
- an inactive area comprising a vertical plane, wherein the vertical plane comprises the substrate, the first electrode overlapping and in contact with the substrate, the piezoelectric layer overlapping and in contact with the first electrode, the gap region overlapping and in contact with the piezoelectric layer, and the second electrode overlapping and in contact with the gap region;
- and
- an interconnect that is in contact with the substrate, the piezoelectric layer and the second electrode.
6 more elements
A resonator device comprising:
- a substrate;
- a cavity positioned on a device surface of the substrate;
- a first electrode disposed over the cavity;
- a piezoelectric layer disposed over the first electrode;
- a second electrode disposed over the piezoelectric layer;
- an active area comprising the cavity and a region of overlapping layers of the first electrode, the piezoelectric layer and the second electrode that are arranged in parallel to the device surface;
- and
- an inactive area comprising a vertical plane, wherein the vertical plane comprises the substrate, the first electrode overlapping and in contact with the substrate, the piezoelectric layer overlapping and in contact with the first electrode, a gap region overlapping and in contact with the piezoelectric layer, and the second electrode overlapping and in contact with the gap region,
- wherein a portion of the second electrode outside the active area is bent in a direction away from the device surface so that the gap region surrounds a portion of the second electrode adjacent to the active area.
6 more elements
An acoustic resonator, comprising:
- a substrate;
- a first electrode;
- a second electrode;
- a piezoelectric layer positioned between the first electrode and the second electrode;
- an acoustic reflector positioned between the first electrode and the substrate;
- an active area comprising the acoustic reflector, the first electrode overlapping and in contact with the acoustic reflector, the piezoelectric layer overlapping and in contact with the first electrode, and the second electrode overlapping and in contact with the piezoelectric layer, wherein a gap region extends around the active area, wherein the gap region comprises at least one of carbon doped silicon dioxide, a dielectric resin, or benzocyclobutene;
- and
- an inactive area comprising a vertical plane, wherein the vertical plane comprises the substrate, the first electrode overlapping and in contact with the substrate, the piezoelectric layer overlapping and in contact with the first electrode, the gap region overlapping and in contact with the piezoelectric layer, and the second electrode overlapping and in contact with the gap region.
5 more elements
Dependencies are inferred from the claim text.