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US 11,108,375 B2Granted
Acoustic wave device, method of fabricating the same, filter, and multiplexer
AssigneeTaiyo Yuden Co., Ltd.
InventorMasafumi Iwaki
Life of this patent
Estimating the term…
Abstract
An acoustic wave device includes: a piezoelectric substrate; and a pair of comb-shaped electrodes located on the piezoelectric substrate, each of the comb-shaped electrodes being formed mainly of a monocrystalline metal film, each of the comb-shaped electrodes including electrode fingers.
Claims11
An acoustic wave device comprising:
- a piezoelectric substrate;
- a pair of comb-shaped electrodes located on the piezoelectric substrate, each of the comb-shaped electrodes being formed mainly of a monocrystalline metal film, each of the comb-shaped electrodes including electrode fingers, and
- an amorphous layer that is in contact with the monocrystalline metal film and the piezoelectric substrate and is located between the monocrystalline metal film and the piezoelectric substrate, the amorphous layer containing, as a main component, a constituent element of at least one of the monocrystalline metal film and the piezoelectric substrate.
An acoustic wave device comprising:
- a piezoelectric substrate;
- a pair of comb-shaped electrodes located on the piezoelectric substrate, each of the comb-shaped electrodes being formed mainly of a monocrystalline metal film each of the comb-shaped electrodes including electrode fingers, and
- a bonding film that is in contact with the monocrystalline metal film and the piezoelectric substrate and is located between the monocrystalline metal film and the piezoelectric substrate, the bonding film containing, as a main component, an element different from a constituent element of the monocrystalline metal film and a constituent element of the piezoelectric substrate.
An acoustic wave device comprising:
- a piezoelectric substrate;
- a pair of comb-shaped electrodes located on the piezoelectric substrate, each of the comb-shaped electrodes being formed mainly of a monocrystalline metal film, each of the comb-shaped electrodes including electrode fingers, wherein
- the monocrystalline metal film is made of a metal having a melting point equal to or greater than a melting point of platinum.
Dependencies are inferred from the claim text.