High power, double-sided thin film filter
AssigneeAVX Corporation
InventorsMichael Marek, Elinor O'Neill, Ronit Nissim
Life of this patent
Estimating the term…
Abstract
A high power thin film filter is disclosed includes a substrate having a substrate thickness in a Z-direction between a first surface and a second surface. A thin film capacitor may be formed over the first surface. A thin film inductor may be spaced apart from the thin film capacitor by at least the thickness of the substrate. A via may be formed in the substrate that electrically connects the thin film capacitor and the thin film inductor. The via may include a polymeric composition.
Claims23
A high power thin film filter comprising:
- a substrate having a first surface and a second surface opposite the first surface in a Z-direction;
- a thin film capacitor formed over the first surface;
- a thin film inductor spaced apart from the thin film capacitor by at least the substrate in the Z-direction;
- and
- a via formed in the substrate and electrically connecting the thin film capacitor and the thin film inductor, the via comprising a polymeric composition.
A high power thin film filter comprising:
- a substrate having a first surface and a second surface opposite the first surface in a Z-direction;
- and
- a thin film capacitor formed over the first surface;
- and
- a thin film inductor spaced apart from the thin film capacitor by at least the substrate;
- wherein the high power thin film filter has an area power capacity that is greater than about 0.5 W/mm2.
A method for forming a high power thin film filter, the method comprising:
- providing a substrate having a first surface and a second surface opposite the first surface in a Z-direction;
- depositing a thin film capacitor over the first surface;
- depositing a thin film inductor that is spaced apart from the thin film capacitor by at least the substrate;
- and
- forming a via in the substrate electrically connecting the thin film capacitor and the thin film inductor, the via comprising a polymeric composition.
Dependencies are inferred from the claim text.