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US 11,108,341 B2Granted
Actuator, optical device, and projector
AssigneeSeiko Epson Corporation
InventorsMakiko Hino, Yasushi Mizoguchi
Life of this patent
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Abstract
At least one of a first beam portion and second beam portions is provided with an out-of-plane vibration suppressing structure configured to suppress vibration of a movable portion in an out-of-plane direction vertical to an in-plane direction. Thus, unintentional occurrence of unintentional movement in the out-of-plane direction vertical to the in-plane direction can be suppressed. Furthermore, in this case, a size reduction of a device can be achieved in comparison with a case where a device includes a motor disposed for rotation driving, for example.
Claims12
An actuator comprising:
- a movable portion;
- a first beam portion coupled to the movable portion;
- a second beam portion coupled to the first beam portion and extending in a direction different from a direction of the first beam portion;
- and
- a driving portion configured to cause the movable portion to undergo curvilinear motion via the first beam portion and the second beam portion by vibration in an in-plane direction of a plane parallel to the direction in which the first beam portion extends and the direction in which the second beam portion extends, wherein
- at least one of the first beam portion and the second beam portion includes an out-of-plane vibration suppressing structure configured to suppress vibration of the movable portion in an out-of-plane direction vertical to the in-plane direction.
3 more elements
Dependencies are inferred from the claim text.