Optical interference light source device of current-temperature controlled semiconductor laser and measurement system including the same

A laser wavenumber scanning interferometry system, comprising:

• an optical interference light source device of a current-temperature controlled semiconductor laser, comprising a heat dissipation plate, a ring-shaped semiconductor refrigerating sheet, a semiconductor laser, a PCB board, a thermal sensor and a fixed plate;
• a beam splitter configured to divide relevant coherent light into two parts;
• a measured lens;
• an optical wedge;
• a CCD camera configured to capture an interference image;
• a computer configured to process image information;
• a controller configured to adjust an operating temperature and an operating current of the semiconductor laser;
• and
• a bilateral telecentric lens for precision inspection,
• wherein a first circular windowed copper area and a second circular copper area are provided at centers of two surfaces of the PCB board, respectively, and the first circular windowed copper area is in contact with the second circular copper area through a via;
• the semiconductor laser is electrically connected to a center of the PCB board, and a lower end of a housing of the semiconductor laser is connected to the first circular windowed copper area through a thermally conductive silicone grease,
• the ring-shaped semiconductor refrigerating sheet is provided with a through hole at a center thereof, a refrigerating surface of the ring-shaped semiconductor refrigerating sheet is connected to the first circular windowed copper area through the thermally conductive silicone grease, the semiconductor laser is sleeved at a center of the through hole, and a heating surface of the ring-shaped semiconductor refrigerating sheet is connected to the heat dissipation plate through the thermally conductive silicone grease;
• the heat dissipation plate is provided with a laser output hole, a center line of the through hole coincides with a center line of the laser output hole, and light emitted by the semiconductor laser coincides with the center line of the laser output hole;
• the PCB board is fixedly installed on the fixed plate, and the second circular copper area is in contact with the fixed plate;
• the thermal sensor is provided on the first circular windowed copper area to detect a temperature of the first circular windowed copper area;
• wherein the optical interference light source device, the bilateral telecentric lens, the optical wedge, and the measured lens are sequentially arranged in a counterclockwise direction, and the beam splitter is located at a center position;
• the coherent light is emitted from the optical interference light source device, and reaches the optical wedge through the beam splitter, to form a first incident light path;
• the coherent light is reflected at the optical wedge and reaches the bilateral telecentric lens through the beam splitter, to form a first reflected light path;
• the coherent light is emitted from the optical interference light source device, and reaches the measured lens through the beam splitter, to form a second incident light path;
• the coherent light is reflected at the measured lens, and reaches the bilateral telecentric lens through the beam splitter, to form a second reflected light path;
• the first reflected light path and the second reflected light path form an interference image after passing through the bilateral telecentric lens;
• and
• the CCD camera is further configured to sample the interference image to obtain an interference signal and send the interference signal to the computer.