Seed layer for multilayer magnetic materials
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsGuenole Jan, Ru-Ying Tong
Life of this patent
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Abstract
A magnetic element is disclosed wherein a composite seed layer such as TaN/Mg enhances perpendicular magnetic anisotropy (PMA) in an overlying magnetic layer that may be a reference layer, free layer, or dipole layer. The first seed layer is selected from one or more of Ta, Zr, Nb, TaN, ZrN, NbN, and Ru. The second seed layer is selected from one or more of Mg, Sr, Ti, Al, V, Hf, B, and Si. A growth promoting layer made of NiCr or an alloy thereof is inserted between the seed layer and magnetic layer. In some embodiments, a first composite seed layer/NiCr stack is formed below the reference layer, and a second composite seed layer/NiCr stack is formed between the free layer and a dipole layer. The magnetic element has thermal stability to at least 400° C.
Claims20
A magnetic element, comprising:
- a seed layer including a first material and a second material different from the first material;
- a growth promoting layer disposed on the seed layer;
- and
- a laminated layer disposed on the growth promoting layer, the laminated layer having intrinsic perpendicular magnetic anisotropy (PMA), the laminated layer having a composition represented by (A1/A2)n/Co/Ru/Co/(A1/A2)p, wherein A1 is a first metal or alloy, wherein A2 is a second metal or alloy different from the first metal or alloy, and wherein “n” and “p” are a number of laminates in (Al/A2)n and (Al/A2)p stacks, respectively.
A magnetic tunnel junction (MTJ), comprising:
- a first seed layer including a first material and a second material;
- a first growth promoting layer disposed on the first seed layer, the first growth promoting layer including NiCr or an alloy thereof;
- a laminated reference layer disposed on the first growth promoting layer, the laminated reference layer having intrinsic perpendicular magnetic anisotropy (PMA);
- a tunnel barrier layer disposed on the laminated reference layer;
- a free layer disposed on the tunnel barrier layer;
- a second seed layer disposed on the free layer, the second seed layer including a third material and a fourth material, the first material being selected from the group consisting of Zr, Nb, TaN, ZrN, NbN, and combinations thereof, the second material being selected from the group consisting of Mg, Sr, Al, Si, MgZr, MgNb, and combinations thereof, the third material being selected from the group consisting of Ta, Zr, Nb, TaN, ZrN, NbN, Ru, and combinations thereof, the fourth material being selected from the group consisting of Mg, Sr, Ti, Al, V, Hf, B, Si, MgZr, MgNb, and combinations thereof;
- a second growth promoting layer disposed on the second seed layer, the second growth promoting layer including NiCr or an alloy of NiCr;
- and
- a dipole layer disposed on the second growth promoting layer, the dipole layer having intrinsic PMA.
A magnetic element, comprising:
- a single seed layer that including a first material and a second material, the first material being selected from the group consisting of Ta, Zr, Nb, TaN, ZrN, NbN, Ru, and combinations thereof, the second material being selected from the group consisting of Mg, Sr, Ti, Al, V, Hf, B, Si, MgZr, MgNb, and combinations thereof;
- a growth promoting layer physically contacting a top surface of the single seed layer, the growth promoting layer including NiCr;
- a laminated layer disposed over the growth promoting layer, the laminated layer having intrinsic perpendicular magnetic anisotropy (PMA) and a composition represented by (A1/A2)n/Co/Ru/Co/(A1/A2)p, wherein A1 is a first metal or alloy, wherein A2 is a second metal or alloy different from the first metal or alloy, and wherein “n” and “p” are a number of laminates in (A1/A2)n and (A1/A2)p stacks, respectively;
- and
- a tunnel barrier layer disposed over on the laminated layer.
Dependencies are inferred from the claim text.