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US 11,107,969 B2Granted
Piezoelectric drive device, robot, and method for driving piezoelectric drive device
AssigneeSeiko Epson Corporation
InventorsTomohisa Iwazaki, Yutaka Arakawa, Akio Konishi, Yuichiro Tsuyuki
Life of this patent
Estimating the term…
Abstract
A piezoelectric drive device includes: a vibrating body having a first surface and a second surface provided with a recessed portion; and a piezoelectric element provided on the first surface. The recessed portion and the piezoelectric element have an overlap region when viewed in a normal direction of the second surface.
Claims12
A piezoelectric drive device comprising:
- a vibrating monolithic plate having a first surface and a second surface opposite to each other;
- a plurality of recesses disposed in the second surface;
- a piezoelectric element provided on the first surface, the piezoelectric element being configured with a first electrode, a second electrode, and a piezoelectric body that is positioned between the first electrode and the second electrode;
- and
- a contact member disposed at a side surface of the vibrating monolithic plate, the contact member contacting a driven member to move the driven member,
- wherein the plurality of recesses overlap the piezoelectric element when viewed in a normal direction of the second surface,
- a thickness of the vibrating monolithic plate is a predetermined thickness T or smaller, and
- when the thickness of the vibrating monolithic plate is the predetermined thickness T, a thickness of the piezoelectric body is ⅕ of T or smaller.
5 more elements
A robot comprising:
- a plurality of links;
- joints that connect the plurality of links;
- and
- a piezoelectric drive device configured to rotate the plurality of links with respect to the joints, the piezoelectric drive device including:
- a vibrating monolithic plate having a first surface and a second surface opposite to each other;
- a plurality of recesses disposed in the second surface;
- a piezoelectric element provided on the first surface, the piezoelectric element being configured with a first electrode, a second electrode, and a piezoelectric body that is positioned between the first electrode and the second electrode;
- and
- a contact member disposed at a side surface of the vibrating monolithic plate, the contact member contacting one of the plurality of links to rotate the one of the plurality of links,
- wherein the plurality of recesses overlap the piezoelectric element when viewed in a normal direction of the second surface,
- a thickness of the vibrating monolithic plate is a predetermined thickness T or smaller, and
- when the thickness of the vibrating monolithic plate is the predetermined thickness T, a thickness of the piezoelectric body is ⅕ of T or smaller.
9 more elements
A method for driving a piezoelectric drive device, the piezoelectric drive device including:
- a vibrating monolithic plate having a first surface and a second surface opposite to each other;
- a plurality of recesses disposed in the second surface;
- a piezoelectric element provided on the first surface, the piezoelectric element including a first electrode, a second electrode, and a piezoelectric body that is positioned between the first electrode and the second electrode;
- and
- a contact member disposed at a side surface of the vibrating monolithic plate, the contact member contacting a driven member to move the driven member, the method comprising:
- applying a voltage, which is periodically changed, between the first electrode and the second electrode so as to vibrate the vibrating monolithic plate and move the driven member by the contact member,
- wherein a thickness of the vibrating monolithic plate is a predetermined thickness T or smaller, and
- when the thickness of the vibrating monolithic plate is the predetermined thickness T, a thickness of the piezoelectric body is ⅕ of T or smaller.
5 more elements
Dependencies are inferred from the claim text.