Memory device and method of fabricating the memory device
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Yu Chang, Sai-Hooi Yeong, Yu-Ming Lin, Chih-Hao Wang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Yu Chang, Sai-Hooi Yeong, Yu-Ming Lin, Chih-Hao Wang
Estimating the term…
The present disclosure provides a semiconductor structure, including a substrate having a memory region and a logic region, the memory region including a first group of nanosheets vertically arranged over a first region of the substrate, wherein the first group of nanosheets includes: a first semiconductor nanosheet, a second group of nanosheets vertically arranged over a second region of the substrate adjacent to the first region, wherein the second group of nanosheets includes: a second semiconductor nanosheet, and a third semiconductor nanosheet over the second semiconductor nanosheet, a first metal gate layer surrounding the first semiconductor nanosheet, and a second metal gate layer surrounding the second semiconductor nanosheet, wherein the first metal gate layer is in direct contact with the second metal gate layer.
A semiconductor structure, comprising:
A memory device, comprising:
A semiconductor structure, comprising:
Dependencies are inferred from the claim text.