Semiconductor device for detection of radiation and method of producing a semiconductor device for detection of radiation

A semiconductor device for detection of radiation, comprising:

• a semiconductor substrate with a surface and an opposite surface;
• an integrated circuit comprising at least one component sensitive to radiation at or near the surface of the substrate;
• a dielectric layer arranged on the surface of the substrate, the dielectric layer comprising silicon dioxide;
• a first wiring of the integrated circuit, the first wiring being formed by a plurality of structured metal layers embedded in the dielectric layer and comprising a contact area;
• a rear wiring on the opposite surface of the substrate, wherein the rear wiring comprises one or more connection portions configured to electrically connect the semiconductor device to a device external to the semiconductor device;
• an electrically conductive through-substrate via comprising a metallization, which penetrates the substrate and connects the contact area of the first wiring with the rear wiring;
• a first passivation layer covering the rear wiring except along the one or more connection portions, wherein the first passivation layer is configured to provide at least one of moisture protection or mechanical protection for the rear wiring and the through-substrate via;
• a second passivation layer formed from silicon nitride, the second passivation layer being completely embedded in the dielectric layer, the first wiring being arranged between the second passivation layer and the substrate, the second passivation layer completely covering the through-substrate via and the first wiring, and wherein the second passivation layer is not in direct contact with the first wiring;
• an opening in the second passivation layer above the component sensitive to radiation;
• an upper surface of the dielectric layer formed from silicon dioxide covering the component sensitive to radiation, the first wiring and the through-substrate via, the upper surface of the dielectric layer being planar;
• an optical filter element arranged immediately on the upper surface of the dielectric layer to be at a higher level than the entire upper surface of the dielectric layer and above the component sensitive to radiation, wherein the optical filter element comprises a first layer and a second layer, wherein first layer is an interference filter and the second layer is an optical color filter;
• the dielectric layer penetrating the second passivation layer in a region located between the optical filter element and the substrate;
• and
• wherein there is an absence of electrically conductive material beyond an upper surface of the second passivation layer facing away from the substrate.