Semiconductor memory devices and methods of fabricating the same
AssigneeSamsung Electronics Co., Ltd.
InventorsSung-Min Hwang, Joon-Sung Lim, Eunsuk Cho
Life of this patent
Estimating the term…
Loading patent…
AssigneeSamsung Electronics Co., Ltd.
InventorsSung-Min Hwang, Joon-Sung Lim, Eunsuk Cho
Estimating the term…
A semiconductor memory device includes a first semiconductor chip and a second semiconductor chip. Each semiconductor chip of the first and second semiconductor chips may include a cell array region and a peripheral circuit region. The cell array region may include an electrode structure including electrodes sequentially stacked on a body conductive layer and vertical structures extending through the electrode structure and connected to the body conductive layer. The peripheral circuit region may include a residual substrate on the body conductive layer and on which a peripheral transistor is located. A bottom surface of the body conductive layer of the second semiconductor chip may face a bottom surface of the body conductive layer of the first semiconductor chip.
A method of fabricating a semiconductor memory device, the method comprising:
A method of fabricating a semiconductor memory device, the method comprising:
Dependencies are inferred from the claim text.