Electronic devices and fabricating processes
AssigneeSTMicroelectronics (Grenoble 2) SAS
InventorDidier Campos
Life of this patent
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Abstract
An electronic device includes a carrier wafer having a front side and a back side, with an electrical connection network configured to connect the front side to the back side. An electronic chip is mounted on the front side of the carrier wafer and electrically connected to front pads of the electrical connection network. A sheet of a thermally conductive graphite or a pyrolytic graphite is added to the back side of the carrier wafer. The sheet includes apertures which leave back pads of the electrical connection network uncovered.
Claims6
A process for fabricating an electronic device, comprising the following steps:
- providing a carrier wafer having a front side and a back side, said carrier wafer being provided with an electrical connection network that connects the front side to the back side and being equipped with at least one electronic chip that is mounted on the front side of the carrier wafer and that is electrically connected to front electrical pads of the electrical connection network;
- equipping the front side of the carrier wafer with an encapsulating block which embeds the at least one electronic chip;
- adhesively bonding a sheet made of thermally conductive material to the back side of the carrier wafer with the encapsulating block, wherein said thermally conductive material is selected from the group consisting of a graphite or a pyrolytic graphite;
- and
- producing apertures through the sheet made of thermally conductive material, said apertures leaving back electrical pads of the electrical connection network at least partially uncovered;
- and
- dicing through the encapsulation block and carrier wafer to singulate the electronic device.
A process for fabricating an electronic device, comprising the following steps:
- placing a sheet made of thermally conductive material on a face of a first portion of a mold, wherein said thermally conductive material is selected from the group consisting of a graphite or a pyrolytic graphite;
- placing a back side of a carrier wafer on the sheet made of thermally conductive material, with interposition of an adhesive layer, wherein said carrier wafer further includes an electrical connection network that connects a front side to the back side and includes at least one electronic chip mounted on the front side and electrically connected to front electrical pads;
- placing a second portion of the mold on the first portion of the mold, so as to form a cavity above the front side of the carrier wafer, in which cavity the at least one electronic chip is located;
- injecting, under pressure, a coating material into said cavity, so as to form an encapsulating block in which the at least one electronic chip is at least partially embedded;
- and
- after extraction from the mold, producing apertures through the sheet made of thermally conductive material, said apertures leaving back electrical pads of the electrical connection network at least partially uncovered.
Dependencies are inferred from the claim text.