Control wafer and method for fabricating semiconductor device

Abstract

A method for fabricating a semiconductor device includes at least the following steps. First, a substrate having a first conductivity type is provided and the substrate is doped with a second conductivity type dopant to form a first well region and a second well region in the substrate, wherein the first conductivity type is opposite to the second conductivity type. An inverter is formed in the first well region. A control transistor and a reference transistor are formed in the second well region, wherein the inverter is electrically connected to the control transistor. An electrical connection path is formed between the inverter and a gate of the control transistor. A difference between electrical parameters of the control transistor and the reference transistor in the control wafer is measured to obtain a measuring result. The semiconductor device having a layout design is fabricated based on the measuring result.

Dependencies are inferred from the claim text.