Semiconductor stocker systems and methods
AssigneeBrooks Automation (Germany) GmbH
InventorLutz Rebstock
Life of this patent
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Abstract
In an embodiment, the present invention discloses cleaned storage processes and systems for high level cleanliness articles, such as extreme ultraviolet (EUV) reticle carriers. A decontamination chamber can be used to clean the stored workpieces. A purge gas system can be used to prevent contamination of the articles stored within the workpieces. A robot can be used to detect the condition of the storage compartment before delivering the workpiece. A monitor device can be used to monitor the conditions of the stocker.
Claims21
A device for monitoring conditions of a stocker, wherein the stocker is configured to store a plurality of workpieces at storage stations within the stocker, the workpieces being a container configured to hold another container, each container configured to form a separate, isolated environment distinguished from each other, the device comprising:
- one or more sensors coupled to the outside surface or the inside of the device, wherein the device has a configuration of the container with a similar size and shape of the workpieces;
- an interface that interfaces with and engages at least one nozzle located at each respective storage station of the stocker so as to collect data, via the one or more sensors, relating to a gas flow distribution in the separate, isolated environment of the container from the one or more nozzles located at each respective storage station;
- a memory coupled to the one or more sensors for storing data collected by the one or more sensors;
- and
- a battery coupled to the memory to power the memory.
A method for monitoring conditions of a stocker, wherein the stocker is configured to store a plurality of workpieces at storage stations within the stocker, the workpieces being a container configured to hold another container, each container configured to form a separate, isolated environment distinguished from each other the method comprising:
- transferring a device to a storage compartment of the stocker, wherein the device has a configuration of the container with a size and shape similar to the workpieces, wherein the device is configured to be transferred by the same mechanism as the workpiece, wherein the device is configured to be disposed in a storage compartment as the workpiece;
- interfacing the device with at least one nozzle located at each respective storage station of the stocker;
- and
- collecting, with the device, gas flow distribution data relating to a gas flow distribution in the separate, isolated environment of the container from the at least one nozzle at each respective storage station or an ambient.
A method of monitoring conditions of an unportable stocker for storing movable workpieces, the method comprising the steps of:
- providing an itinerant non-workpiece device being sized and shaped substantially as one of the movable workpieces;
- forming within the unportable stocker an integral unportable storage chamber, for storing the movable workpieces, with one or more nozzles disposed therein that matingly engage with and deliver, via mating engagement of a nozzle exit with at least one of the movable workpieces, a gas flow inside an interior volume of the at least one movable workpiece matingly engaged to the one or more nozzles;
- transferring the itinerant non-workpiece device to and from the storage chamber with a robot that is configured for transferring the movable workpieces to and from the storage chamber;
- and
- forming within the unportable storage chamber an integral unportable station, that is operable to support the at least one movable workpiece, that forms a seating surface configured so as to support and mate with the itinerant non-workpiece device and the seating surface has a non-workpiece seating surface interface that interfaces with the itinerant non-workpiece device that engages the one or more nozzles, the non-workpiece seating surface interface being different than a workpiece seating surface interface of the seating surface that interfaces the at least one movable workpiece with the station.
Dependencies are inferred from the claim text.