Conveying system and method for operating the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsFu-Hsien Li, Chi-Feng Tung, Hsiang Yin Shen
Life of this patent
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsFu-Hsien Li, Chi-Feng Tung, Hsiang Yin Shen
Estimating the term…
A method includes providing a rail, a first conveying unit movably mounted on the rail, and a central controller configured to control the first conveying unit; displacing the first conveying unit along the rail at a first speed; obtaining a first vibration measurement upon the displacement of the first conveying unit along the rail at the first speed; analyzing the first vibration measurement; transmitting a first signal based on the analysis of the first vibration measurement to the central controller; providing a second conveying unit movably mounted on the rail; transmitting a first feedback signal based on the first signal from the central controller to the second conveying unit; and displacing the second conveying unit along the rail at a second speed based on the first feedback signal.
A method, comprising:
A method, comprising:
Dependencies are inferred from the claim text.