Gas phase etching device and gas phase etching apparatus

A gas phase etching apparatus, comprising:

• a gas phase etching device;
• and
• a transfer device,
• wherein:
• the gas phase etching device and the transfer device are connected to allow a workpiece to be transferred between the gas phase etching device and the transfer device;
• and
• the gas phase etching device includes:
• a reaction chamber body defining a space inside the reaction chamber body as a reaction chamber;
• a pedestal disposed inside the reaction chamber and configured for holding the workpiece;
• an inlet member connected to the reaction chamber body and configured for introducing etchants into the reaction chamber;
• a pressure regulating assembly connected to the reaction chamber body and configured for regulating a pressure inside the reaction chamber;
• a first temperature controller connected to the reaction chamber body and configured for controlling a temperature inside the reaction chamber to a first temperature, wherein the first temperature is a temperature that prevents the reaction chamber body from being corroded by the etchants;
• a second temperature controller connected to the pedestal and configured for controlling a temperature of the pedestal to a second temperature, wherein the second temperature is a temperature under which the workpiece held by the pedestal satisfies a temperature requirement for directly performing a subsequent process;
• and
• a liner assembly including a first liner and a second liner, wherein:
• the first liner and the second liner are configured to stack in a vertical relationship to form a first gap between the first liner and the pedestal and a second gap between the first liner and the second liner, and the first liner and the second liner cover and shield sidewalls of the reaction chamber body;
• a position of the second gap corresponds to a position of the pedestal;
• and
• a reaction by-product passes through the first gap, the second gap, and a third gap between the second liner and the reaction chamber body to be extracted out of the reaction chamber.