Multi-charged particle beam image acquisition apparatus and multi-charged particle beam image acquisition method

A multi-charged particle beam image acquisition apparatus comprising:

• an image acquisition mechanism, including a stage on which a target object is capable to be disposed and a deflector which deflects multiple charged particle beams in an array arrangement, configured to acquire, in a state where a scan region width to be scanned by each beam of the multiple charged particle beams has been set depending on an image averaging frequency, image data of the each beam by scanning the target object with the multiple charged particle beams deflected by the deflector while relatively shifting an angle of a moving direction of the stage and an angle of an array arranging direction of the multiple charged particle beams from each other;
• and
• an averaging circuit configured to average, using the image data of the each beam, errors of the image data by superimposing image data of a same position at the image averaging frequency.