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US 11,107,659 B2Granted
Ion generator and ion implanter
AssigneeSumitomo Heavy Industries Ion Technology Co., Ltd.
InventorHiroki Murooka
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Abstract
There is provided an ion generator including a vapor generating chamber for generating a vapor by heating a raw material in which a first solid material which is a single substance of an impurity element and a second solid material which is a compound containing the impurity element are mixed with each other, and a plasma generating chamber for generating a plasma containing ions of the impurity element by using the vapor.
Claims18
An ion generator comprising:
- a vapor generating chamber for generating a vapor by heating a raw material in which a first solid material which is a single substance of an impurity element and a second solid material which is a compound containing the impurity element are mixed with each other;
- and
- a plasma generating chamber for generating a plasma containing ions of the impurity element by using the vapor.
Dependencies are inferred from the claim text.