Charged particle beam device

A charged particle beam device comprising:

• a charged particle beam source configured to generate a charged particle beam;
• an objective lens configured to focus the charged particle beam to a sample;
• a first charged particle detecting element disposed between the charged particle beam source and the objective lens and configured to detect charged particles generated by an interaction between the charged particle beam and the sample;
• and
• a first charged particle beam aperture disposed on an optical axis of the charged particle beam and having an opening portion, wherein
• the first charged particle detecting element is disposed on a center position of the opening portion of the first charged particle beam aperture.

A charged particle beam device comprising:

• a charged particle beam source configured to generate a charged particle beam;
• an objective lens configured to focus the charged particle beam to a sample;
• a first charged particle detecting element disposed between the charged particle beam source and the objective lens and configured to detect charged particles generated by an interaction between the charged particle beam and the sample;
• and
• a drive mechanism configured to adjust an angle formed between a position of a detection surface of the first charged particle detecting element or the detection surface of the first charged particle detecting element and an center axis of the objective lens, wherein
• the detection surface of the first charged particle detecting element is disposed on the center axis of the objective lens, and detects an interference between the charged particles generated by the interaction between the charged particle beam and the sample.