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US 11,107,208 B2Granted
Optical verification system and methods of verifying micro device transfer
OwnerPatrick J. Czarnota, Paul Argus Parks +7inventors
InventorsPatrick J. Czarnota, Paul Argus Parks, Nile A. Light, Stephen P. Bathurst, John H. Higginson, Stephen R. Deming, Robert B. Martin, Tsan Y. Chan, Andreas Bibl
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Abstract
An optical verification method and mass transfer system described. In an embodiments, a mass transfer sequence may be accompanied by optical imaging and inspection to detect pick and place errors. The optical imaging and inspection techniques may be performed in-situ.
Claims19
A mass transfer system comprising:
- a motion system that is translatable along a translation track between a donor substrate stage and a receiving substrate stage;
- an encoder secured to the motion system;
- and
- an image capture system located between the donor substrate stage and the receiving substrate stage, the image capture system including:
- an illumination system to illuminate the motion system;
- an inspection camera;
- an optical imaging system to relay optical energy reflected from the motion system to the inspection camera;
- and
- a frame grabber to detect the encoder as the motion system is translated between the donor substrate stage and the receiving substrate state and trigger image capture with the inspection camera.
6 more elements
A non-transitory computer-readable storage medium comprising executable instructions to cause a processor to perform operations, the instructions comprising:
- picking up an array of micro devices from a donor substrate with a micro pick up array (MPA), each micro device including a micro device layer;
- moving the MPA toward a receiving substrate, the MPA including an MPA layer;
- and
- detecting an encoder with a frame grabber as the MPA is translated toward the receiving substrate to trigger image capture of a surface of the MPA with an inspection camera.
1 more element
Dependencies are inferred from the claim text.