Transition cells for advanced technology processes
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYung-Hsu Chuang, Wen-Shen Chou, Yung-Chow Peng, Yu-Tao Yang, Yun-Ru Chen
Life of this patent
Estimating the term…
Abstract
A method including the operations of receiving a preliminary device layout including a plurality of active areas, analyzing the preliminary device layout to identify empty areas between the plurality of active areas, determining the configurations of the active areas bordering the empty areas, selecting a transition cell from a transition cell library in which the transition cell has a transitional configuration for reducing density gradient effects in the active areas adjacent the transition cell, and inserting the transition cells into the empty areas to define a modified device layout.
Claims20
A computer-implemented method comprising:
- receiving a preliminary device layout including a plurality of active areas;
- analyzing the preliminary device layout to identify an empty area between a first active area and a second active area;
- determining a first configuration of the first active area;
- determining a second configuration of the second active area;
- selecting a transition cell from a transition cell library, wherein the transition cell has a transitional configuration compatible with both the first configuration and the second configuration;
- and
- inserting the transition cell into the empty area to define a modified device layout.
A computer-implemented method comprising:
- receiving a device layout including a plurality of active areas;
- identifying empty areas between a first active area and a second active area by analyzing the device layout;
- determining a first configuration of the first active area and a second configuration of the second active area;
- selecting a transitional cell from a transitional cell library, wherein the selected transitional cell has a transitional configuration compatible with both the first configuration and the second configuration;
- inserting the transitional cell into the empty area to define a modified device layout;
- and
- repeating the determining, selecting, and inserting operations until each of the empty areas identified in the device layout has been replaced by a transitional cell to define a final modified device layout.
A computer-implemented method comprising:
- receiving a device layout;
- identifying empty areas between a first active area and a second active area by analyzing the device layout;
- determining a first configuration of the first active area and a second configuration of the second active area;
- selecting a first subset of transitional cells from a transitional cell library, wherein each of the first subset of target transition cell has a transitional configuration compatible with both the first configuration and the second configuration;
- calculating a gate density uniformity for each of a set of revised device layouts incorporating one of the first subset of transitional cells;
- and
- inserting the one of the first subset of transitional cells that produces a highest degree of gate density uniformity the revised device layout to produce a modified device layout.
Dependencies are inferred from the claim text.