Method of manufacturing conductive lines in a circuit
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorChung-Hui Chen
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Abstract
A method of manufacturing conductive lines in a circuit is disclosed. The method includes grouping signal traces into a first set of signal traces and a second set of signal traces, fabricating, using a first mask, at least a first conductive line of a first signal trace of the first set of signal traces, and fabricating, using a second mask, at least a second conductive line of a second signal trace of the second set of signal traces. Each signal trace of the first set of signal traces has a first width. Each signal trace of the second set of signal traces has a second width different from the first width. The grouping is based on at least a current of at least a signal trace of the signal traces.
Claims20
A method of manufacturing conductive lines in a circuit, comprising:
- grouping signal traces into a first set of signal traces and a second set of signal traces;
- fabricating, using a first mask, at least a first conductive line of a first signal trace of the first set of signal traces;
- and
- fabricating, using a second mask, at least a second conductive line of a second signal trace of the second set of signal traces,
- wherein
- each signal trace of the first set of signal traces has a first width;
- each signal trace of the second set of signal traces has a second width different from the first width;
- and
- the grouping is based on at least a current of at least a signal trace of the signal traces and a resistivity-capacitive constant of at least the signal trace of the signal traces.
A method of manufacturing conductive lines in a circuit, comprising:
- grouping conductive signal traces into a first set of conductive signal traces and a second set of conductive signal traces;
- manufacturing, using a first mask, a first conductive line of a first conductive signal trace of the first set of conductive signal traces;
- and
- manufacturing, using a second mask, a second conductive line of a second conductive signal trace of the second set of conductive signal traces,
- wherein
- each conductive signal trace of the first set of conductive signal traces has a first width in a first direction;
- each conductive signal trace of the second set of conductive signal traces has a second width in the first direction, the second width being different from the first width;
- and
- the grouping is based on at least a current of at least a conductive signal trace of the conductive signal traces and a resistivity-capacitive constant of at least the conductive signal trace of the conductive signal traces.
A method of manufacturing conductive lines in a circuit, comprising:
- grouping conductive signal traces into a first group of conductive signal traces and a second group of conductive signal traces;
- manufacturing, by a first mask, at least a first conductive line of a first conductive signal trace of the first group of conductive signal traces;
- and
- manufacturing, by a second mask, at least a second conductive line of a second conductive signal trace of the second group of conductive signal traces,
- wherein
- each conductive signal trace of the first group of conductive signal traces has a first width in a first direction;
- each conductive signal trace of the second group of conductive signal traces has a second width in the first direction, the second width greater than the first width;
- and
- the grouping is based on at least a current of a conductive signal trace of the conductive signal traces and a resistivity-capacitive constant of the conductive signal trace of the conductive signal traces.
Dependencies are inferred from the claim text.