X-ray diffraction and X-ray spectroscopy method and related apparatus

A system for rapidly measuring and analyzing structure and composition of a material sample, comprising:

• an X-ray source configured to emit a white X-ray beam;
• a sample stage for holding a sample and placing the sample on an irradiation path of the X-ray source;
• a two-dimensional energy dispersive detector disposed in a predetermined spatial relationship with the sample stage to receive X-ray signals from the sample, the two-dimensional energy dispersive detector including an array of energy dispersive pixels, each pixel being an independent detector unit configured to detect an energy dispersive X-ray spectrum;
• and
• a controller connected to the X-ray source, the sample stage, and the two-dimensional energy dispersive detector, to control them and to perform data analysis;
• wherein the controller includes a computer usable non-transitory medium having a computer readable program code embedded therein for controlling the controller, the computer readable program code configured to cause the controller to execute a process for analyzing data detected by the two-dimensional energy dispersive detector, the process comprising:
• separating X-ray diffraction signals and X-ray spectroscopy signals in the energy dispersive X-ray spectrum detected by each pixel;
• correcting the detected X-ray diffraction signals by a correction function which includes at least a quantum efficiency of the detector, a transmission of air and the sample, an X-ray spectrum of the light source;
• summing the corrected X-ray diffraction signals and X-ray spectroscopy signals, respectively, over all pixels of the two-dimensional energy dispersive detector, to obtain an enhanced diffraction spectrum and an enhanced spectroscopy spectrum;
• using the enhanced diffraction spectrum to determine the structure of the sample;
• and
• using the enhanced spectroscopy spectrum to determine the composition of the sample.