Sensor wiring substrate, sensor package, and sensor device
AssigneeKYOCERA Corporation
InventorsYuusuke Takei, Ryuuji Mori
Life of this patent
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AssigneeKYOCERA Corporation
InventorsYuusuke Takei, Ryuuji Mori
Estimating the term…
The present invention relates to a sensor wiring substrate in which a decrease in detection accuracy is suppressed, a sensor package, and a sensor device. A gas sensor wiring substrate includes a substrate having a first accommodation recessed portion for accommodating a microphone element and a second accommodation recessed portion for accommodating an infrared light emitting element, and connection wiring. In the gas sensor wiring substrate, thermal resistance of a heat transfer path between a bottom surface of the first accommodation recessed portion and a bottom surface of the second accommodation recessed portion is greater than thermal resistance in any position of an imaginal heat transfer path in case of a depth of the first accommodation recessed portion identical with a depth of the second accommodation recessed portion. For example, the depth of the second accommodation recessed portion is deeper than the depth of the first accommodation recessed portion.
A sensor wiring substrate comprising:
A sensor wiring substrate comprising:
Dependencies are inferred from the claim text.