Distribution system for chemical and/or electrolytic surface treatment
AssigneeSemsysco GmbH
InventorsAndreas Gleissner, Franz Markut, Herbert Ötzlinger
Life of this patent
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Abstract
An exemplary distribution system, apparatus and method can be provide for chemical and/or electrolytic surface treatment of a substrate in a process fluid. The distribution system can comprise a distribution body and a control unit. The distribution body can be configured to direct a flow of the process fluid and/or an electrical current to the substrate. The distribution body can comprise at least a first distribution element and a second distribution element. The control unit/device can be configured to control the first distribution element and the second distribution element separately from one another.
Claims13
A distribution system for at least one of a chemical surface treatment or an electrolytic surface treatment of a substrate in a process fluid, comprising:
- a distribution body comprising a first distribution element and a second distribution element;
- and
- a control device configured to control the first distribution element and the second distribution element separately from one another,
- wherein the distribution body is configured to direct a flow of a process fluid so as to facilitate a switching of the second distribution element off separately and independently from the first distribution element,
- wherein the first distribution element corresponds to an inner circle or an inner rectangle of the distribution body, and
- wherein the second distribution element is shaped to change the shape of the distribution body into another one of the inner circle or the inner rectangle.
A distribution system for at least one of a chemical surface treatment or an electrolytic surface treatment of a substrate in a process fluid, comprising:
- a distribution body configured to direct at least one of (i) a flow of the process fluid or (ii) an electrical current to the substrate, the distribution body comprising a first distribution element and a second distribution element;
- and
- a control device configured to control the first distribution element and the second distribution element separately from one another, wherein the second distribution element corresponds to an outer element of the distribution body at least partially surrounding the first distribution element.
An apparatus for at least one of a chemical surface treatment or an electrolytic surface treatment of a substrate in a process fluid, comprising:
- a distribution system comprising:
- a distribution body configured comprising a first distribution element and a second distribution element, and
- a control device configured to control the first distribution element and the second distribution element separately from one another;
- and
- a substrate holder configured to hold the substrate,
- wherein the distribution body is configured to direct a flow of a process fluid so as to facilitate a switching of the second distribution element off separately and independently from the first distribution element,
- wherein the first distribution element corresponds to an inner circle or an inner rectangle of the distribution body, and
- wherein the second distribution element is shaped to change the shape of the distribution body into another one of the inner circle or the inner rectangle.
A distribution method for at least one of a chemical surface treatment or an electrolytic surface treatment of a substrate in a process fluid, comprising:
- providing a distribution body which comprises a first distribution element and a second distribution element;
- controlling the first distribution element;
- and
- controlling the second distribution element, wherein the first distribution element and the second distribution element are controlled separately from one another,
- wherein the distribution body is configured to direct a flow of a process fluid so as to facilitate a switching of the second distribution element off separately and independently from the first distribution element,
- wherein the first distribution element corresponds to an inner circle or an inner rectangle of the distribution body, and
- wherein the second distribution element is shaped to change the shape of the distribution body into another one of the inner circle or the inner rectangle.
A distribution system for at least one of a chemical surface treatment or an electrolytic surface treatment of a substrate in a process fluid, comprising:
- a distribution body configured to direct at least one of (i) a flow of the process fluid or (ii) an electrical current to the substrate, the distribution body comprising a first distribution element and a second distribution element;
- and
- a control device configured to control the first distribution element and the second distribution element separately from one another,
- wherein the first distribution element corresponds to an inner circle or an inner rectangle of the distribution body.
A distribution system for at least one of a chemical surface treatment or an electrolytic surface treatment of a substrate in a process fluid, comprising:
- a distribution body configured to direct at least one of (i) a flow of the process fluid or (ii) an electrical current to the substrate, the distribution body comprising a first distribution element and a second distribution element;
- and
- a control device configured to control the first distribution element and the second distribution element separately from one another,
- wherein the first distribution element is one of a circle or a rectangle,
- wherein the second distribution element is shaped to change the shape of the distribution body into another one of the circle or the rectangle, and
- wherein the second distribution element is shaped to change the shape of the distribution body into another one of the circle or the rectangle.
Dependencies are inferred from the claim text.