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US 11,104,572 B2Granted
Planar cavity MEMS and related structures, methods of manufacture and design structures
AssigneeInternational Business Machines Corporation
InventorsChristopher V. Jahnes, Anthony K. Stamper
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Abstract
A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper electrode over another insulator material on top of the lower electrode which is at least partially in contact with the lower electrode. The forming of the lower electrode and the upper electrode includes adjusting a metal volume of the lower electrode and the upper electrode to modify beam bending.
Claims15
A method of forming a Micro-Electro-Mechanical System (MEMS), comprising:
- forming a beam;
- forming a first sacrificial layer on the beam;
- forming an insulator layer on the first sacrificial layer;
- forming a cavity via in the insulator layer, exposing a portion of the first sacrificial layer;
- forming an electrode on the insulator layer;
- forming a second sacrificial layer over the beam and in the cavity via;
- forming a lid material over the second sacrificial layer and the electrode;
- and
- providing a vent hole in the lid material to expose at least the second sacrificial layer;
- and
- venting the first sacrificial layer and the second sacrificial layer to form at least a lower cavity and an upper cavity.
8 more elements
Dependencies are inferred from the claim text.