HF-VHF quartz MEMS resonator
AssigneeHRL Laboratories, LLC
InventorsRandall L. Kubena, Deborah J. Kirby, Hung Nguyen, David T. Chang
Life of this patent
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Abstract
A MEMS resonator comprising a baseplate wafer; a piezoelectric HF-VHF resonator that comprises a monolithic piezoelectric member having at least two separate spring piezoelectric support members integrally extending therefrom, each spring piezoelectric support member having at least a rounded corner; said piezoelectric resonator being attached to the baseplate wafer by said support members; wherein said monolithic piezoelectric member comprises first and second main surfaces joined by side edges; at least one of said side edges forming an angle of between 90 and 105 degrees with one of the first and second main surfaces.
Claims10
A MEMS resonator comprising:
- a baseplate wafer;
- a piezoelectric HF—VHF resonator that comprises a monolithic piezoelectric member having at least two separate spring piezoelectric support members integrally extending therefrom;
- each spring piezoelectric support member having at least a rounded corner;
- said piezoelectric resonator being attached to the baseplate wafer by said support members;
- wherein
- said monolithic piezoelectric member comprises first and second main surfaces joined by side edges;
- at least one of said side edges forming an angle of between plus and minus 15 degrees from the normal with one of the first and second main surfaces.
Dependencies are inferred from the claim text.