Substrate processing system

A substrate processing system, comprising:

• a substrate processing set, comprising at least one substrate supporting part, wherein the at least one substrate supporting part is used for supporting a substrate which is vertical;
• and
• a substrate holding unit, comprising two cantilevers and two substrate holding parts, each of the two substrate holding parts being respectively located on each of the two cantilevers,
• wherein the two substrate holding parts are used for vertically holding the substrate;
• wherein when the substrate holding unit moves close to the substrate processing set, and the two substrate holding parts contact the substrate, the two substrate holding parts hold the substrate;
• wherein a process of the substrate holding unit holding the substrate comprises the steps of:
• the two substrate holding parts descending to be lower than a first height of the substrate;
• the two substrate holding parts moving horizontally to the substrate and the two substrate holding parts respectively being aligned with two sides of the substrate;
• the two substrate holding parts ascending to contact the two sides of the substrate;
• and
• the two substrate holding parts ascending and holding the substrate such that the substrate leaves the at least one substrate supporting part.