Beam propagation camera and method for light beam analysis
AssigneeCarl Zeiss SMT GmbH
InventorMatthias Manger
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Abstract
A beam propagation camera has at least one beam-splitting optical arrangement (240) configured to split a beam, which is incident on the beam-splitting optical arrangement along an optical axis (OA) of the beam propagation camera, into a multiplicity of sub-beams, and a sensor arrangement (250) configured to detect the sub-beams. The beam-splitting optical arrangement has a diffractive structure (241) configured such that at least two of the sub-beams are spatially separated from one another on the sensor arrangement and have respective foci longitudinally offset from one another along the optical axis.
Claims20
A beam propagation camera, having an optical axis and comprising:
- at least one beam-splitting optical arrangement configured to split an optical beam, which is incident on the beam-splitting optical arrangement along the optical axis, into a multiplicity of sub-beams;
- and
- a sensor arrangement configured to detect the sub-beams;
- wherein the beam-splitting optical arrangement comprises a diffractive structure;
- and
- wherein the diffractive structure is configured such that at least two of the sub-beams are separated spatially from one another on the sensor arrangement and have respective foci offset from one another longitudinally along the optical axis.
A method for light beam analysis, comprising:
- beam-splitting a beam propagating along an optical axis into a multiplicity of sub-beams;
- measuring respective spot sizes generated by the sub-beams on a sensor arrangement;
- and
- calculating at least one of divergence (θ), focal position (z0) and waist size (w0) beam parameters from the measured spot sizes;
- wherein said beam splitting comprises using a diffractive structure to spatially separate at least two of the sub-beams from one another on the sensor arrangement through a focus offset in a longitudinal direction of the optical axis.
Dependencies are inferred from the claim text.