Light inspection system and method of the surface and inside of a sample
AssigneeFyla Laser, S.L.
InventorsPere Pérez Millán, Salvador Torres Peiró, Javier Abreu Afonso, Héctor Muñoz Marco, Viorel Otgon
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AssigneeFyla Laser, S.L.
InventorsPere Pérez Millán, Salvador Torres Peiró, Javier Abreu Afonso, Héctor Muñoz Marco, Viorel Otgon
Estimating the term…
A light inspection system and method of the surface and inside of a sample. The system includes a light source generating a light beam to impinge on a sample; an imaging system obtaining an image of said sample and including a parabolic mirror with a hole to allow the passage of the light beam towards the sample, and the redirection of a scattered light component of the sample towards a light capturing unit comprising a bundle of bifurcated fibers; the bundle of fibers having a central fiber and external fibers, the central fiber receiving scattered light from the surface and the external fibers receiving scattered light from inside the sample; a measuring system measuring a power and/or a spectrum collected in the central and the external fibers.
A light inspection system of the surface and inside of a sample, the system comprising:
A light inspection method of the surface and inside of a sample, comprising:
Dependencies are inferred from the claim text.