Vacuum bellows hot valve
AssigneeKitz Sct Corporation
InventorKazuo Iijima
Life of this patent
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Abstract
A vacuum bellows hot valve with durability and drivability not impaired by increased temperature and voltage of a heating device while having a simple, compact structure, the valve also allowing temperature control with high accuracy. In the vacuum bellows hot valve, a stem is provided inside a valve box with an inflow port and an outflow port so as to freely ascend and descend, a bellows is elastically provided to a valve body provided at a lower end of the stem and on an outer circumferential side of the stem, a cylindrical ceramic heater is arranged between an inner circumference of the bellows and an outer circumference of the stem, and a temperature measuring part of a thermocouple for control is arranged at a position close to the valve body.
Claims8
A vacuum bellows hot valve comprising:
- a valve box having an inflow port and an outflow port;
- a stem is provided inside the valve box so as to freely ascend and descend;
- a valve body provided at a lower end of the stem;
- a bellows elastically provided to the valve body and on an outer circumferential side of the stem;
- a cylindrical ceramic heater arranged between an inner circumference of the bellows and an outer circumference of the stem,
- wherein the ceramic heater is configured by attaching a plate-shaped ceramic heater material on a side surface of a metal tubular member with high thermal conductivity, the metal tubular member having a flange part;
- and
- a temperature measuring part of a thermocouple for control is arranged at a position adjacent to the valve body.
Dependencies are inferred from the claim text.